Substrate holding apparatus and polishing apparatus
A substrate holding apparatus holds a substrate such as a semiconductor and presses the substrate against a polishing surface. The substrate holding apparatus includes a top ring body ( 2 ) for holding the substrate, a plurality of fluid passages ( 33, 34, 35, 36 ) for supplying a fluid to a plurality of pressure chambers ( 22, 23, 24, 25 ) defined in the top ring body, and a plurality of sensors (S 1 , S 2 , S 3 , S 4 ) disposed in the fluid passages, respectively, for detecting flowing states of the fluid which flows through the fluid passages.
1. A polishing apparatus comprising:
a polishing table having a polishing surface; and
a substrate holding apparatus for holding a substrate and pressing the substrate against said polishing surface, said substrate holding apparatus comprising:
a top ring body for holding the substrate, said top ring body having a plurality of pressure chambers defined in said top ring body;
a plurality of fluid passages for supplying a fluid to said to said plurality of pressure chambers; and
a plurality of sensors disposed in said plurality of fluid passages, respectively, operable to detect at least one of a flow direction of the fluid, a flow velocity of the fluid and a flow rate of the fluid that is supplied to and flows through said plurality of fluid passages.
2. A polishing apparatus according to claim 1 , wherein said plurality of sensors include sensors disposed in two of said fluid passages connected to two of said pressure chambers, respectively, that are adjacent to each other and separated by a boundary.
3. A polishing apparatus according to claim 1 , wherein said plurality of sensors are operable to detect both the flow velocity of the fluid and the flow direction of the fluid.
4. A polishing apparatus according to claim 1 , and further comprising a controller for controlling said polishing apparatus, wherein polishing of a substrate is stopped when two of said plurality of sensors, disposed in said two of said fluid passages connected to two of said pressure chambers, respectively, that are adjacent to each other, detect respective fixed flow directions of the fluid.
5. A polishing apparatus according to claim 4 , wherein the fixed flow directions are a flow direction of the fluid corresponding to pressurizing the substrate and a flow direction of the fluid corresponding to depressurizing the substrate.
6. A polishing apparatus according to claim 4 , wherein the fixed flow directions are opposite directions to each other.
7. A polishing apparatus according to claim 1 , and further comprising a controller for controlling said polishing apparatus wherein polishing of a substrate is stopped when two of said plurality of sensors, disposed in said two of said fluid passages connected to two of said pressure chambers, respectively, that are adjacent to each other, detect the same flowrate of the fluid.
8. A polishing apparatus according to claim 1 , and further comprising a controller for controlling said polishing apparatus wherein polishing of a substrate is stopped when two of said plurality of sensors, disposed in said two of said fluid passages connected to two of said pressure chambers, respectively, that are adjacent to each other, detect respective fixed flow directions of the fluid and respective fixed flow rates of the fluid.
9. A polishing apparatus according to claim 8 , wherein the fixed flow directions are opposite directions to each other.
10. A polishing apparatus according to claim 8 , wherein the fixed flow directions are opposite directions to each other and the fixed flow rates are identical to each other.
11. A polishing apparatus according to claim 1 , and further comprising a controller for controlling said polishing apparatus wherein polishing of a substrate is not stopped irrespective of a flow rate of the fluid detected by said sensor until a pressure variation in said fluid passage reaches a predetermined value or less or a predetermined rate or less of a setting pressure after a pressurizing condition in said pressure chamber is reached.
12. A polishing apparatus according to claim 1 , further comprising a plurality of pressure sensors disposed in said plurality of fluid passages, respectively.