Method for bonding semiconductor chip
A method for bonding a semiconductor chip is disclosed. In accordance with the method of the present invention, a front surface of a wafer is mounted in a wafer holder to face downward. Each of dies of the wafer is then pushed downward to a tray disposed therebelow, thereby eliminating a need for a separate flipping process of the semiconductor chip and two or more robot arms.
1. A semiconductor chip bonding method comprising steps of:
(a) preparing a wafer having a plurality of semiconductor chips disposed on a front surface thereof;
(b) disposing the wafer on a wafer holder in a manner that the front surface of the wafer faces downward;
(c) pushing each of the plurality of semiconductor chips downward to be disposed on a tray having a plurality of semiconductor chip guides;
(d) sequentially picking up each of the plurality of semiconductor chips from the tray and disposing the picked up semiconductor chip on an object to be bonded; and
(e) bonding the plurality of semiconductor chips to the object to be bonded.
2. The method in accordance with claim 1 , wherein the step (a) comprises dicing the wafer along a scribe lane on the wafer.
3. The method in accordance with claim 1 , wherein the step (c) comprises conveying the tray according to an arrangement gap of an object to be bonded to adjust a distance between the plurality of semiconductor chips disposed in the tray.
4. The method in accordance with claim 1 , wherein the step (e) comprises:
pressure-bonding each of the plurality of semiconductor chips to the object to be bonded; and
heat-bonding each of the plurality of semiconductor chips to the object to be bonded.
5. The method in accordance with claim 1 , wherein the object to be bonded comprises an antennal of an RFID tag.
6. The method in accordance with claim 1 , further comprising forming a protective layer protecting a bonding region of the semiconductor chip and the object to be bonded.
7. The method in accordance with claim 6 , further comprising curing the protective layer by radiating an ultraviolet ray.
8. The method in accordance with claim 6 , wherein the protective layer comprises an epoxy resin.
9. The method in accordance with claim 1 , further comprising providing the object to be bonded through a magazine having plurality of the objects continuously loaded therein.
10. The method in accordance with claim 1 , wherein the step (c) comprises disposing the semiconductor chip pushed downward in the semiconductor chip guide of the tray by a vacuum suction.