IP Library Granted Patent US 7,606,448
Granted Patent B2
US 7,606,448 · App. 11/717,770 · Granted Oct 20, 2009

Zinc oxide diodes for optical interconnections

Assignee: Micron Technology, Inc.
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Quick Facts
Patent No.
US 7,606,448
App. No.
11/717,770
Granted
Oct 20, 2009
Kind
B2
Abstract

The present disclosure includes methods, devices, and systems for zinc oxide diodes for optical interconnections. One system includes a ZnO emitter confined within a circular geometry in an oxide layer on a silicon substrate. An optical waveguide is formed in the oxide layer and has an input coupled to the ZnO emitter. A detector is coupled to an output of the optical waveguide.

Claims (43)

1. A method for forming an optical signal interconnect system, comprising:

forming a light emitting diode in an undoped oxide layer on a silicon substrate, wherein forming the diode includes;

forming an circular opening in the undoped oxide layer;

depositing an amorphous buffer layer of Zinc Oxide (ZnO) on the silicon substrate within the circular opening;

growing single crystalline ZnO on the buffer layer with p-type doping and then n-type doping; and

providing a conductive contact to the n-type doping on the undoped oxide layer such that the conductive contact defines a circular opening.

2. The method of claim 1 , wherein the method includes providing a metal conductive contact, wherein the circular opening to the conductive contact has a diameter which is less than a diameter of the circular opening in the undoped oxide layer.

3. The method of claim 1 , wherein the method includes forming a silicon detector on a different substrate and facing the silicon detector opposite the light emitting diode across an air gap

4. The method of claim 1 , wherein the method includes coupling the light emitting diode to an input of an optical waveguide.

5. The method of claim 4 , wherein the method includes:

coupling the light emitting diode to an input of a Zinc Magnesium Oxide (ZnMgO) waveguide; and

coupling an output of the ZnMgO waveguide to a silicon photodiode detector.

6. The method of claim 4 , wherein the method includes coupling the light emitting diode to an input of a hollow core photonic bandgap waveguide formed in silicon oxide.

7. The method of claim 6 , wherein the method includes:

coupling the light emitting diode to a hollow core photonic bandgap waveguide having a ZnO core; and

coupling an output of the hollow core photonic bandgap waveguide to a silicon detector.

8. An optical signal interconnect system, comprising:

an optical waveguide formed in an oxide layer on a silicon substrate;

a single crystalline ZnO emitter confined within a circular geometry in the oxide layer, grown in the circular geometry using a hybrid beam deposition (HBD) process with p-type doping and then n-type doping over an amorphous buffer layer of ZnO in contact with the silicon substrate, and coupled to an input of the optical waveguide; and

a detector coupled to an output of the optical waveguide.

9. The interconnect system of claim 8 , wherein:

the optical waveguide is a Zinc Magnesium Oxide (ZnMgO) waveguide; and

the detector is a silicon photodiode detector.

10. The interconnect system of claim 8 , wherein the optical waveguide is a hollow core photonic bandgap waveguide.

11. The interconnect system of claim 8 , wherein a metal conductive contact, with a circular opening that has a diameter which is less tan a diameter of the circular geometry in the oxide layer, couples the ZnO emitter to the input of the optical waveguide.

12. The interconnect system of claim 8 , wherein the p-type doping includes Arsenic (As) doping and the n-type doping includes Gallium (Ga) doping.

13. The interconnect system of claim 8 , wherein the ZnO emitter emits wavelengths of approximately 380 nm at a photon energy of approximately 3.3 eV.

14. The interconnect system of claim 8 , wherein the detector is a silicon photodiode detector capable of receiving optical signals having a wavelength between 500 and 375 nanometers (nm).

15. An optical signal interconnect system, comprising:

a single crystalline ZnO emitter confined within a circular geometry in an oxide layer on a silicon substrate, grown in the circular geometry using a hybrid beam deposition (HBD) process with p-type doping and then n-type doping over an amorphous buffer layer of ZnO in contact with the silicon substrate;

an optical waveguide formed in the oxide layer and having an input coupled to the ZnO emitter;

a detector coupled to an output of the optical waveguide; and

wherein the ZnO emitter emits a wavelength having a photon energy which is less than a bandgap energy of the optical waveguide but larger than a bandgap energy of the detector.

16. The optical signal interconnect system of claim 15 , wherein the optical waveguide is a Magnesium doped Zinc Oxide (MgZnO) waveguide.

17. A method for operating an optical signal interconnect system, comprising:

operating a single crystalline ZnO emitter confined within a circular geometry in an oxide layer on a silicon substrate grown in the circular geometry using a hybrid beam deposition (HBD) process with p-type doping and then n-type doping over an amorphous buffer layer of ZnO in contact with the silicon substrate to emit optical signals; and

using a silicon photodiode receiver to receive optical signals having a wavelength between 500 and 375 nanometers (nm).

18. The method of claim 17 , wherein the method includes operating the ZnO emitter to emit ultraviolet optical signals.

19. The method of claim 17 , wherein the method includes operating the ZnO emitter to emit optical signals having a wavelength of approximately 380 nm and a photon energy of approximately 3.3 eV.

20. The method of claim 17 , wherein the method of operating includes coupling emissions from the ZnO emitter to an input of a MgZnO waveguide.

21. The method of claim 17 , wherein the method of operating includes coupling emissions between the ZnO emitter and the silicon photodiode detector through an air gap.

22. The method of claim 17 , wherein the method of operating includes coupling emissions from the ZnO emitter to an input of a hollow core photonic bandgap waveguide.

23. The method of claim 17 , wherein the method includes using the silicon photodiode detector to detect optical signals optical signals and convert the optical signals to electrical signals.

Assignments (8)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 9, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050937/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 23, 2018
From: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 047243/0001 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REPLACE ERRONEOUSLY FILED PATENT #7358718 WITH THE CORRECT PATENT #7358178 PREVIOUSLY RECORDED ON REEL 038669 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY INTEREST. Recorded Jun 8, 2017
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 043079/0001 →
PATENT SECURITY AGREEMENT Recorded Jun 2, 2016
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 038954/0001 →
SECURITY INTEREST Recorded May 12, 2016
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 038669/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 13, 2007
From: FORBES, LEONARD; AHN, KIE Y.
To: MICRON TECHNOLOGY, INC.
Reel/Frame 019057/0180 →
Continuity (1)
Related Publication 20080226220A1 · Sep 18, 2008