Method and structure for reducing floating body effects in MOSFET devices
View Patent ↗A field effect transistor (FET) device includes a bulk substrate, a gate insulating layer formed over the bulk substrate, source and drain regions formed in an active device area associated with the bulk substrate, the source and drain regions each defining a p/n junction with respect to a body region of the active device area, and a conductive plug formed within a cavity defined in the source region, across the p/n junction of the source region and into the body region, wherein the conductive plug facilitates a discharge path between the body region and the source region.
1. A method for forming a field effect transistor (FET) device, the method comprising:
forming a buried insulator layer over a bulk substrate;
forming a silicon-on-insulator (SOI) layer over the buried insulator layer;
forming a gate insulating layer over the SOI layer;
forming source and drain regions in an active device area associated with the SOI layer, the source and drain regions each defining a p/n junction with respect to a body of the active device area;
forming silicide contacts on a top surface of the source and drain regions; and
forming a cavity in the source region, across the p/n junction of the source region and into the body, and forming a conductive plug within the cavity, wherein the conductive plug further comprises a titanium nitride (TiN) liner material formed within the cavity and a tungsten (W) metal fill material formed over the liner material;
wherein the cavity extends through the silicide contact formed on the top surface of the source region, both the cavity and the plug extend vertically down through a bottom portion of the source region and into the SOI layer, and both the cavity and the plug extend laterally across the source region, in a direction toward the drain region, and across the p/n junction of the source region and into the body above the buried insulator layer; and
wherein the conductive plug facilitates a discharge path between the body and the source region.
2. A method for reducing floating body effects in a silicon-on-insulator (SOI) field effect transistor (FET) device, the method comprising:
forming a buried insulator layer over a bulk substrate;
forming a silicon-on-insulator (SOI) layer over the buried insulator layer;
forming a gate insulating layer over the SOI layer;
implanting a germanium (Ge) species in at least a source side of the device, so as to create a region of etch selectivity with respect to the SOI layer;
implanting source and drain halo regions;
implanting source and drain extension regions;
forming deep source and drain regions within the SOI layer, the deep source and drain regions each defining a p/n junction with respect to a body of an active device area within the SOI layer; and
forming a cavity in the source region, across the p/n junction of the deep source region and into the body, and forming a conductive plug within the cavity, wherein the cavity and the plug extend laterally across the deep source region, in a direction toward the deep drain region, and across the p/n junction of the deep source region and into the body above the buried insulator layer;
wherein the region of etch selectivity facilitates isotropic, lateral etching thereof during the formation of the cavity; and
wherein the conductive plug facilitates a discharge path between the body and the source region.