Through-silicon via and method for forming the same
A method for forming a through-silicon via includes the steps of defining a groove in each chip of a wafer which has a plurality of semiconductor chips; applying liquid polymer on the wafer to fill the groove; forming an insulation layer on a sidewall of the groove through patterning the polymer; forming a metal layer to fill the groove which is formed with the insulation layer on the sidewall thereof; and back-grinding a backside of the wafer to expose the metal layer filled in the groove.
1. A method for forming a through-silicon via in a semiconductor wafer, said method comprising the steps of:
defining a groove in a wafer, said wafer capable of forming a plurality of semiconductor chips;
applying a liquid polymer onto the wafer to fill the groove and to cover an upper surface of the wafer by a process including spin coating;
removing at least part of the polymer filled in the groove and all of the polymer covering the upper surface of the wafer such that a portion of a bottommost surface of the groove is exposed so as to form an insulation layer on a sidewall of the groove through patterning the polymer;
applying a metal to fill the groove, which includes an insulation layer on a sidewall; and
back-grinding a backside of the wafer to expose the metal layer filled in the groove,
wherein the insulation layer formed on the sidewall of the groove provides a flexible mechanical interface between the sidewall of the groove and the metal filling the groove such that the insulation layer can accommodate variations in thermal expansion coefficients between the wafer having the groove and the metal filling the groove.
2. The method as set forth in claim 1 , wherein the step of defining a groove includes the steps of:
forming on the wafer, a photoresist pattern for exposing a through-silicon via forming region on at least one chip;
etching exposed portions, using the photoresist pattern as an etch mask; and
removing the photoresist pattern.
3. The method as set forth in claim 1 , wherein the step of patterning the polymer uses a photolithographic process.
4. The method as set forth in claim 1 , wherein the step of patterning of the polymer includes the step of exposing and developing a photosensitive polymer.
5. The method as set forth in claim 1 , wherein the patterning of the polymer removes a portion of the polymer using a laser.
6. The method as set forth in claim 1 , wherein the step of forming a metal layer comprises the sub steps of:
depositing a seed metal layer in the groove, which includes the insulation layer and on the wafer;
forming on the seed metal layer deposited on the wafer a photoresist pattern for exposing the groove and surrounding portions of the seed metal layer;
plating a metal layer on exposed portions of the seed metal layer through an electroplating process; and
removing the photoresist pattern.