Semiconductor device having interlayer insulating film covered with hydrogen diffusion barrier film and its manufacture method
An interlayer insulating film made of insulating material is formed on a semiconductor substrate. A hydrogen diffusion barrier film is formed on the interlayer insulating film, the hydrogen diffusion barrier film being made of material having a higher hydrogen diffusion barrier function than a hydrogen diffusion barrier function of material of the interlayer insulating film. The semiconductor substrate formed with the interlayer insulating film and hydrogen diffusion barrier film is thermally treated. In the process of forming the interlayer insulating film, the interlayer insulating film is formed under the condition that a moisture content becomes 5×10 −3 g/cm 3 or lower. Even if annealing is performed after the hydrogen diffusion barrier film is formed, a crack is hard to be formed in the underlying interlayer insulating film.
1. A semiconductor device comprising:
a semiconductor substrate having semiconductor elements formed thereon;
an interlayer insulating film formed over the semiconductor substrate and made of insulating material having a moisture content of 5×10 −3 g/cm 3 or lower;
a first hydrogen diffusion barrier film formed over the interlayer insulating film and made of material having a higher hydrogen diffusion barrier function than a hydrogen diffusion barrier function of material of the interlayer insulating film;
a second hydrogen diffusion barrier film disposed between the semiconductor substrate and the interlayer insulating film, and made of material having a higher hydrogen diffusion barrier function than a hydrogen diffusion barrier function of material of the interlayer insulating film;
a via hole penetrating the first hydrogen diffusion barrier film, the interlayer insulating film and the second hydrogen barrier film; and
a plug filling the via hole, further comprising
a ferroelectric capacitor formed over the semiconductor substrate and covered with the interlayer insulating film, wherein the second hydrogen diffusion barrier film covers an upper face and a side face of the ferroelectric capacitor.
2. The semiconductor device according to claim 1 , wherein the interlayer insulating film is made of silicon oxide.
3. The semiconductor device according to claim 1 , wherein the first hydrogen diffusion barrier film is made of aluminum oxide, aluminum nitride, tantalum oxide, tantalum nitride, titanium oxide, or zirconium oxide.
4. The semiconductor device according to claim 1 , wherein the plug is electrically connected to one of the semiconductor elements and the ferroelectric capacitor.
5. The semiconductor device according to claim 1 , further comprises a third hydrogen diffusion barrier film covering a bottom face of the ferroelectric capacitor, and made of material having a higher hydrogen diffusion barrier function than a hydrogen diffusion barrier function of material of the interlayer insulating film.
6. The semiconductor device according to claim 1 , wherein the second hydrogen diffusion barrier film is made of alumina.
7. The semiconductor device according to claim 5 , wherein the third hydrogen diffusion barrier film is made of alumina.