Substrate processing apparatus and substrate processing method
The present invention is a substrate processing apparatus including: a holder that holds substrates in a tier-like manner; a processing container that contains the holder and that conducts a predetermined thermal process to the substrates in a process-gas atmosphere under a predetermined temperature and pressure; a gas-introducing part that introduces a process gas into the processing container; a gas-discharging part that discharges a gas from the processing container to create a predetermined vacuum pressure therein; and a heating part that heats the processing container; wherein the holder is provided with baffle plates each of which forms a processing space for each substrate when the holder is contained in the processing container; the gas-introducing part is provided with gas introduction holes disposed at one lateral side of the respective processing spaces; and the gas-discharging part is provided with gas discharge holes disposed at the other lateral side of the respective processing spaces, oppositely to the gas introduction holes.
1. A substrate processing apparatus comprising:
a holder that holds substrates in a tier-like manner,
a processing container that contains the holder and that conducts a predetermined thermal process to the substrates in a process-gas atmosphere under a predetermined temperature and pressure,
a gas-introducing part that introduces a process gas into the processing container,
a gas-discharging part that discharges a gas from the processing container to create a predetermined vacuum pressure therein, and
a heating part that heats the processing container,
wherein
the holder is provided with baffle plates each of which forms a processing space for each substrate when the holder is contained in the processing container,
the gas-introducing part is provided with gas introduction holes disposed at one lateral side of the respective processing spaces,
the gas-discharging part is provided with gas discharge holes disposed at the other lateral side of the respective processing spaces, oppositely to the gas introduction holes,
the processing container has a double-tube structure consisting of an inner tube and an outer tube,
an upper end of the inner tube and an upper end of the outer tube are closed,
the holder is adapted to be contained in the inner tube,
a space formed between the inner tube and the outer tube communicates with the gas-discharging part,
the gas-introducing part has a gas-introducing tube extending in a vertical direction,
a containing groove is formed on an inside surface of the inner tube in order to contain the gas-introducing tube, and
a minute gap is adapted to be formed between an inside surface of the inner tube and an outside surface of the holder when the holder is contained in the inner tube, the minute gap allowing the holder to rotate but being made as small as possible such that gas-diffusion from each processing space to the adjacent upper and lower processing spaces is prevented.
2. A substrate processing apparatus comprising:
a holder that holds substrates in a tier-like manner,
a processing container that contains the holder and that conducts a predetermined thermal process to the substrates in a process-gas atmosphere under a predetermined temperature and pressure,
a gas-introducing part that introduces a process gas into the processing container,
a gas-discharging part that discharges a gas from the processing container to create a predetermined vacuum pressure therein, and
a heating part that heats the substrates placed in the processing container,
wherein
the holder is provided with placing plates for placing the substrates, each placing plate being formed as a circular baffle plate for forming a processing space for each substrate when the holder is contained in the processing container,
the gas-introducing part is provided with gas introduction holes disposed at one lateral side of the respective processing spaces,
the gas-discharging part is provided with gas discharge holes disposed at the other lateral side of the respective processing spaces, oppositely to the gas introduction holes,
the processing container has a double-tube structure consisting of an inner tube and an outer tube,
an upper end of the inner tube and an upper end of the outer tube are closed,
the holder is adapted to be contained in the inner tube,
a space formed between the inner tube and the outer tube communicates with the gas-discharging part,
the gas-introducing part has a gas-introducing tube extending in a vertical direction,
a containing groove is formed on an inside surface of the inner tube in order to contain the gas-introducing tube, and
a minute gap is adapted to be formed between an inside surface of the inner tube and an outside surface of the holder when the holder is contained in the inner tube, the minute gap allowing the holder to rotate but being made as small as possible such that gas-diffusion from each processing space to the adjacent upper and lower processing spaces is prevented.
3. A substrate processing method of conducting a predetermined thermal process to substrates by using a substrate processing apparatus, the substrate processing apparatus including:
a holder that holds substrates in a tier-like manner,
a processing container that contains the holder and that conducts a predetermined thermal process to the substrates in a process-gas atmosphere under a predetermined temperature and pressure,
a gas-introducing part that introduces a process gas into the processing container,
a gas-discharging part that discharges a gas from the processing container to create a predetermined vacuum pressure therein, and
a heating part that heats the processing container,
wherein
the holder is provided with baffle plates each of which forms a processing space for each substrate when the holder is contained in the processing container,
the gas-introducing part is provided with gas introduction holes disposed at one lateral side of the respective processing spaces,
the gas-discharging part is provided with gas discharge holes disposed at the other lateral side of the respective processing spaces, oppositely to the gas introduction holes,
the processing container has a double-tube structure consisting of an inner tube and an outer tube,
an upper end of the inner tube and an upper end of the outer tube are closed,
the holder is adapted to be contained in the inner tube,
a space formed between the inner tube and the outer tube communicates with the gas-discharging part,
the gas-introducing part has a gas-introducing tube extending in a vertical direction,
a containing groove is formed on an inside surface of the inner tube in order to contain the gas-introducing tube, and
a minute gap is adapted to be formed between an inside surface of the inner tube and an outside surface of the holder when the holder is contained in the inner tube, the minute gap allowing the holder to rotate but being made as small as possible such that gas-diffusion from each processing space to the adjacent upper and lower processing spaces is prevented,
the substrate processing method comprising:
a thermal processing step of forming parallel process-gas flows with respect to the substrates and conducting a predetermined thermal process to the substrates, by introducing the process gas from the gas-introduction holes and discharging the gas from the gas-discharging holes for the respective processing spaces, and
a purging step of purging the respective processing spaces after the thermal processing step, by introducing an inert gas from the gas-introduction holes and discharging the gas from the gas-discharging holes.
4. A substrate processing method of conducting a predetermined thermal process to substrates by using a substrate processing apparatus, the substrate processing apparatus including:
a holder that holds substrates in a tier-like manner,
a processing container that contains the holder and that conducts a predetermined thermal process to the substrates in a process-gas atmosphere under a predetermined temperature and pressure,
a gas-introducing part that introduces a process gas into the processing container,
a gas-discharging part that discharges a gas from the processing container to create a predetermined vacuum pressure therein,
a heating part that heats the substrates placed in the processing container,
the processing container has a double-tube structure consisting of an inner tube and an outer tube,
an upper end of the inner tube and an upper end of the outer tube are closed,
the holder is adapted to be contained in the inner tube,
a space formed between the inner tube and the outer tube communicates with the gas-discharging part,
the gas-introducing part has a gas-introducing tube extending in a vertical direction,
a containing groove is formed on an inside surface of the inner tube in order to contain the gas-introducing tube, and
a minute gap is adapted to be formed between an inside surface of the inner tube and an outside surface of the holder when the holder is contained in the inner tube, the minute gap allowing the holder to rotate but being made as small as possible such that gas-diffusion from each processing space to the adjacent upper and lower processing spaces is prevented,
wherein
the holder is provided with placing plates for placing the substrates, each placing plate being formed as a circular baffle plate for forming a processing space for each substrate when the holder is contained in the processing container,
the gas-introducing part is provided with gas introduction holes disposed at one lateral side of the respective processing spaces, and
the gas-discharging part is provided with gas discharge holes disposed at the other lateral side of the respective processing spaces, oppositely to the gas introduction holes,
the substrate processing method comprising:
a thermal processing step of forming parallel process-gas flows with respect to the substrates and conducting a predetermined thermal process to the substrates, by introducing the process gas from the gas-introduction holes and discharging the gas from the gas-discharging holes for the respective processing spaces, and
a purging step of purging the respective processing spaces after the thermal processing step, by introducing an inert gas from the gas-introduction holes and discharging the gas from the gas-discharging holes.
5. A storage medium capable of being read by a computer, storing a control program to be executed by a computer in order to control a substrate processing apparatus, the substrate processing apparatus including:
a holder that holds substrates in a tier-like manner,
a processing container that contains the holder and that conducts a predetermined thermal process to the substrates in a process-gas atmosphere under a predetermined temperature and pressure,
a gas-introducing part that introduces a process gas into the processing container,
a gas-discharging part that discharges a gas from the processing container to create a predetermined vacuum pressure therein, and
a heating part that heats the processing container,
wherein
the holder is provided with baffle plates each of which forms a processing space for each substrate when the holder is contained in the processing container,
the gas-introducing part is provided with gas introduction holes disposed at one lateral side of the respective processing spaces,
the gas-discharging part is provided with gas discharge holes disposed at the other lateral side of the respective processing spaces, oppositely to the gas introduction holes,
the processing container has a double-tube structure consisting of an inner tube and an outer tube,
an upper end of the inner tube and an upper end of the outer tube are closed,
the holder is adapted to be contained in the inner tube,
a space formed between the inner tube and the outer tube communicates with the gas-discharging part,
the gas-introducing part has a gas-introducing tube extending in a vertical direction,
a containing groove is formed on an inside surface of the inner tube in order to contain the gas-introducing tube, and
a minute gap is adapted to be formed between an inside surface of the inner tube and an outside surface of the holder when the holder is contained in the inner tube, the minute gap allowing the holder to rotate but being made as small as possible such that gas-diffusion from each processing space to the adjacent upper and lower processing spaces is prevented,
the control program is adapted to be executed so as to achieve:
a thermal processing step of forming parallel process-gas flows with respect to the substrates and conducting a predetermined thermal process to the substrates, by introducing the process gas from the gas-introduction holes and discharging the gas from the gas-discharging holes for the respective processing spaces, and
a purging step of purging the respective processing spaces after the thermal processing step, by introducing an inert gas from the gas-introduction holes and discharging the gas from the gas-discharging holes.
6. A storage medium capable of being read by a computer, storing a control program to be executed by a computer in order to control a substrate processing apparatus, the substrate processing apparatus including:
a holder that holds substrates in a tier-like manner,
a processing container that contains the holder and that conducts a predetermined thermal process to the substrates in a process-gas atmosphere under a predetermined temperature and pressure,
a gas-introducing part that introduces a process gas into the processing container,
a gas-discharging part that discharges a gas from the processing container to create a predetermined vacuum pressure therein, and
a heating part that heats the substrates placed in the processing container,
wherein
the holder is provided with placing plates for placing the substrates, each placing plate being formed as a circular baffle plate for forming a processing space for each substrate when the holder is contained in the processing container,
the gas-introducing part is provided with gas introduction holes disposed at one lateral side of the respective processing spaces,
the gas-discharging part is provided with gas discharge holes disposed at the other lateral side of the respective processing spaces, oppositely to the gas introduction holes,
the processing container has a double-tube structure consisting of an inner tube and an outer tube,
an upper end of the inner tube and an upper end of the outer tube are closed,
the holder is adapted to be contained in the inner tube,
a space formed between the inner tube and the outer tube communicates with the gas-discharging part,
the gas-introducing part has a gas-introducing tube extending in a vertical direction,
a containing groove is formed on an inside surface of the inner tube in order to contain the gas-introducing tube, and
a minute gap is adapted to be formed between an inside surface of the inner tube and an outside surface of the holder when the holder is contained in the inner tube, the minute gap allowing the holder to rotate but being made as small as possible such that gas-diffusion from each processing space to the adjacent upper and lower processing spaces is prevented,
the control program is adapted to be executed so as to achieve:
a thermal processing step of forming parallel process-gas flows with respect to the substrates and conducting a predetermined thermal process to the substrates, by introducing the process gas from the gas-introduction holes and discharging the gas from the gas-discharging holes for the respective processing spaces, and
a purging step of purging the respective processing spaces after the thermal processing step, by introducing an inert gas from the gas-introduction holes and discharging the gas from the gas-discharging holes.