Selective links in silicon hetero-junction bipolar transistors using carbon doping and method of forming same
View Patent ↗Bipolar transistors and methods of forming the bipolar transistors. The method including forming a P-type collector in a silicon substrate; forming an intrinsic base on the collector, the intrinsic base including a first N-type dopant species, germanium and carbon; forming an N-type extrinsic base over a first region and a second region of the intrinsic base, the first region over the collector and the second region over a dielectric adjacent to the collector, the N-type extrinsic base containing or not containing carbon; and forming a P-type emitter on the first region of the intrinsic base.
1. A bipolar transistor, comprising:
a P-type collector in a silicon substrate;
an intrinsic base on said collector, said intrinsic base including a first N-type dopant species, germanium and carbon;
an N-type extrinsic base over a first region and a second region of said intrinsic base, said first region over said collector and said second region over a dielectric adjacent to said collector, said N-type extrinsic base including a second N-type dopant species;
a P-type emitter on said first region of said intrinsic base; and
said intrinsic base includes:
a first intrinsic silicon layer on said collector;
a first silicon-germanium (SiGe) layer on said first intrinsic silicon layer, said first SiGe layer doped with carbon;
an N-type doped SiGe layer on said first SiGe layer, said N-type doped SiGe layer doped with said N-type dopant species and carbon;
a second SiGe layer on said first intrinsic silicon layer, said second SiGe layer doped with carbon; and
a second intrinsic silicon layer on said second SiGe layer.
2. The bipolar transistor of claim 1 , wherein said first intrinsic silicon layer, said first SiGe layer, said N-type doped SiGe layer, said second SiGe layer and said second intrinsic silicon layer are chemical vapor deposition deposited films.
3. The bipolar transistor of claim 1 , wherein said extrinsic base extends into said second SiGe layer in said second region of said intrinsic base.
4. The bipolar transistor of claim 1 , wherein said P-type collector and said P-type emitter are each doped with boron, said N-type doped SiGe layer is doped with phosphorous and said N-type extrinsic base is doped with arsenic, antimony or both arsenic and antimony.
5. The transistor of claim 1 , wherein said N-type extrinsic base also includes carbon.
6. The transistor of claim 1 , wherein:
said first N-type dopant species has a diffusivity in silicon containing carbon that is less than a diffusivity of said first N-type dopant species in silicon without carbon; and
said second N-type dopant species has a diffusivity in silicon containing carbon that is greater than a diffusivity of said second N-type dopant species in silicon without carbon.
7. A bipolar transistor, comprising:
a P-type collector in a silicon substrate;
an intrinsic base on said collector, said intrinsic base including a first N-type dopant species, germanium and carbon;
an N-type extrinsic base over a first region and a second region of said intrinsic base, said first region over said collector and said second region over a dielectric adjacent to said collector, said extrinsic base including a second N-type dopant species and carbon;
a P-type emitter on said first region of said intrinsic base; and
wherein said intrinsic base includes:
a first intrinsic silicon layer on said collector;
a first silicon-germanium (SiGe) layer on said first intrinsic silicon layer and doping said first SiGe layer with carbon;
an N-type doped SiGe layer on said first SiGe layer, said N-type doped SiGe layer doped with said first N-type dopant species and carbon;
a second SiGe layer on said first intrinsic silicon layer, said second SiGe layer with carbon; and
a second intrinsic silicon layer on said second SiGe layer.
8. The bipolar transistor of claim 7 , wherein said first intrinsic silicon layer, said first SiGe layer, said N-type doped SiGe layer, said second SiGe layer and said second intrinsic silicon layer are chemical vapor deposition deposited films.
9. The bipolar transistor of claim 7 , wherein said extrinsic base extends into said second SiGe layer in said second region of said intrinsic base and extends into said second SiGe layer in regions of said first region of said intrinsic base not directly under said P-type emitter.
10. The bipolar transistor of claim 7 , wherein said P-type collector and said P-type emitter are each doped with boron, said N-type doped SiGe layer is doped with phosphorous and said N-type extrinsic base is doped with arsenic, antimony or both arsenic and antimony.
11. The bipolar transistor of claim 7 , wherein:
said first N-type dopant species has diffusivity in silicon containing carbon that is less than a diffusivity of said first N-type dopant species in silicon without carbon; and said second N-type dopant has a diffusivity in silicon containing carbon that is greater than a diffusivity of said second N-type species in silicon without carbon.