Heat treatment method wherein the substrate holder is composed of two holder constituting bodies that move relative to each other
A heat treatment method includes a substrate holder that holds a plurality of substrates at predetermined vertical intervals and is carried into a heat treating furnace for performing a predetermined heat treatment on the substrates. The substrate holder has two holder constituting bodies each having a plurality of columns and substrate holding sections. One of the holder constituting bodies holds the substrates at a first, vertically adjacent distance so that their front surfaces face each other, while the other of the holder constituting bodies holds the substrates at a second, vertically adjacent distance so that their back surfaces face each other wherein the second distance is smaller than the first distance to ensure uniformity of the heat treatment. At least one of the holder constituting bodies moves in the vertical direction to change the positions of the holder constituting bodies relative to each other.
1. A heat treatment method, in which a plurality of substrates to be treated is held by a substrate holder at predetermined vertical intervals, the substrate holder is carried into a heat treating furnace, and a predetermined heat treatment is performed on the substrates, said method comprising the steps of:
arranging the substrates in the substrate holder such that front surfaces or back surfaces of the substrates vertically adjacent to each other face each other; and
setting a first distance between one of a first pair of substrates that are vertically adjacent each other and have respective front surfaces facing each other and the other of the first pair of substrates to ensure uniformity of the treatment, and setting a second distance between one of a second pair of substrates that are vertically adjacent each other and have respective back surfaces facing each other and the other of the second pair of substrates to be smaller than the first distance, wherein
the substrate holder is composed of two holder constituting bodies, and each of the holder constituting bodies has a plurality of columns each including a plurality of substrate holding sections, the substrate holding sections of each of the holder constituting bodies being arranged at a predetermined vertical interval and adapted to hold circumferential portions of the substrates, the columns being arranged on the circumference of the same imaginary circle;
one of the holder constituting bodies holds the substrates under the condition that the front surfaces of the substrates face upward, and the other of the holder constituting face upward, so that the substrate with the front surface facing upward and the substrate with the back surface facing upward are alternately arranged in a vertical direction; and
at least one of the two holder constituting bodies moves up and down to change the positions of the two holder constituting bodies relative to each other so that the first distance is set to ensure the uniformity of the treatment and larger than the second distance.
2. The heat treatment method according to claim 1 , further comprising the step of pivoting at least one of the two holder constituting bodies in the circumferential direction to change the positions of the two holder constituting bodies relative to each other so that the columns of the two holder constituting bodies surround the circumferential portions of the substrates under the condition that a distance between any two of the columns is smaller than the diameters of the substrates.