Copolymer and composition for organic and antireflective layer
The present invention provides an organic anti-reflection coating composition comprising a copolymer represented by the following Formula 1, a light absorbent, a thermal acid generating agent, and a curing agent: wherein R 1 , R 2 and R 3 are each independent to each; R 1 represents hydrogen or an alkyl group having 1 to 10 carbon atoms; R 2 represents hydrogen, an alkyl group having 1 to 10 carbon atoms or an arylalkyl group having 1 to 20 carbon atoms; R 3 is hydrogen or a methyl group; m and n are repeating units in the main chain, while m+n=1, and they have values of 0.05<m/(m+n)<0.95 and 0.05<n/(m+n)<0.95. The anti-reflection coating using the polymer of the invention has excellent adhesiveness and storage stability, and a very high dry etching rate, and exhibits excellent resolution in both C/H patterns and L/S patterns.
1. An organic anti-reflection coating composition comprising a copolymer represented by the following Formula 1, a light absorbent, a thermal acid generating agent, and a curing agent
wherein R 1 , R 2 and R 3 are each independent to each; R 1 represents hydrogen or an alkyl group having 1 to 10 carbon atoms, R 2 represents hydrogen, an alkyl group having 1 to 10 carbon atoms or an arylalkyl group having 1 to 20 carbon atoms; R 3 is hydrogen or a methyl group; m and n are repeating units in the main chain, while m+n=1, and they have values of 0.05<m/(m+n)<0.95 and 0.05<n/(m+n)<0.95.
2. The organic anti-reflection coating composition according to claim 1 , wherein the light absorbent is the copolymer represented by the following Formula 8, and the weight average molecular weight is 1,000 to 100,000:
wherein R 81 represents an alkyl group having 1 to 10 carbon atoms, R 82 represents hydrogen, an hydroxyl group or an alkyl group having 1 to 10 carbon atoms; m and n are repeating units in the main chain, while m+n=1, and they have values of 0.05<m/(m+n)<0.95 and 0.05<n/(m+n)<0.95.
3. The organic anti-reflection coating composition according to claim 2 , wherein the compound of Formula 8 is a light absorbent generated by reacting a copolymer of the following Formula 9 which is produced by polymerizing maleic anhydride and a styrene compound, with an alkyl alcohol having 1 to 10 carbon atoms:
wherein R 91 is hydrogen, an hydroxyl group or an alkyl group having 1 to 10 carbon atoms; m and n are repeating units in the main chain, while m+n=1, and they have values of 0.05<m/(m+n)<0.95 and 0.05<n/(m+n)<0.95.
4. The organic anti-reflection coating composition according to claim 1 , wherein the light absorbent is a compound represented by the following formula 14, 19 or 20:
wherein R 141 is selected among
R 142 and R 143 represent each independent hydrogen, an alkyl group having 1˜10 of carbon atoms or alkoxy group having 1˜10 of carbon atoms
5. The organic anti-reflection coating composition according to claim 1 , wherein the curing agent has two or more cross-linkable functional groups per compound and is selected from the group consisting of aminoplastic compounds, polyfunctional epoxy resins, anhydrides and mixtures thereof.
6. The organic anti-reflection coating composition according to claim 5 , wherein the cross-linkable functional group is at least one selected from the group consisting of a methylol group, an alkoxymethyl group, an oxetanyl group, an oxazoline group, a cyclocarbonate group, an alkoxysilyl group, an aziridinyl group, an isocyanate group, an alkoxymethylamino group, aminomethylol group, and a polyfunctional epoxy group, all substituting the hydrogen atom on the amino group of a glycoluril compound, a urea compound, benzoguanamine compound, or a melamine compound.
7. The organic anti-reflection coating composition according to claim 1 , wherein the thermal acid generating agent used is at least one selected from the group consisting of a compound of the following Formula 21 to 23
8. The organic anti-reflection coating composition according to claim 1 , wherein the composition comprises at least one solvent selected from the group consisting of propylene glycol monomethyl ether (PGME), propylene glycol monomethyl ether acetate (PGMEA), cyclohexanone, ethyl lactate, propylene glycol n-propyl ether, dimethylformamide (DMF), gamma-butyrolactone, ethoxyethanol, methoxyethanol, methyl 3-methoxypropionate (MMP), and ethyl 3-ethoxypropionate (EEP).
9. The organic anti-reflection coating composition according to claim 1 , wherein the composition comprises 0.1 to 40% by weight of the copolymer for organic anti-reflection coating, 0.1 to 40% by weight of the light absorbent, 0.01 to 20% by weight of the thermal acid generating agent, and 0.01 to 40% by weight of the curing agent.
10. The organic anti-reflection coating composition according to claim 1 , wherein the copolymer of Formula 1 is a copolymer for organic anti-reflection coating generated by reacting a reaction intermediate of the following Formula 2 which is produced by polymerizing maleic anhydride and an alkyl acrylate compound, with an alkyl alcohol having 1 to 10 carbon atoms:
wherein R 2 and R 3 are each independent, R 2 is hydrogen, an alkyl group having 1 to 10 carbon atoms or an arylalkyl group having 1 to 20 carbon atoms; R 3 is hydrogen or a methyl group; m and n are repeating units in the main chain, while m+n=1, and they have values of 0.05 <m/(m+n)<0.95 and 0.05<n/(m+n)<0.95.
11. The organic anti-reflection coating composition according to claim 10 , wherein the alkyl acrylatepe compound is selected from the group consisting of methyl acrylate, ethyl acrylate, isopropyl acrylate, normal propyl acrylate, normal butyl acrylate, isobutyl acrylate, tert-butyl acrylate, cyclohexyl acrylate, isobornyl acrylate, 2-ethylhexyl acrylate, methyl methacrylate, ethyl methacrylate, isopropyl methacrylate, normal propyl methacrylate, tert-butyl methacrylate, normal butyl methacrylate, isobutyl methacrylate, cyclohexyl methacrylate, isobornyl methacrylate and 2-ethylhexyl methacrylate.