IP Library Granted Patent US 8,049,166
Granted Patent B2
US 8,049,166 · App. 12/645,610 · Granted Nov 1, 2011

Mass spectrometer system and mass spectrometry method

Assignee: Canon Anelva Corporation
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Quick Facts
Patent No.
US 8,049,166
App. No.
12/645,610
Granted
Nov 1, 2011
Kind
B2
Abstract

A mass spectrometer system comprises a chamber having an ion emitting unit to emit metal ions in the chamber with a communicating hole; a neutral molecule introduction unit; another gas introduction unit; a controller controlling a temperature of a region where metal ions attach to the neutral molecules; and a mass analyzer for the neutral molecules with the metal ions, wherein plotting an attachment energy of the metal ions attached to the neutral molecules in the chamber along an abscissa and the temperature of the region where the metal ions attach to the neutral molecules along an ordinate, the controller adjusts the temperature of the region so as to fall within a range obtained by excluding a range corresponding to the temperature of the region from 150 to 200° C. from a range surrounded by the temperatures of the region [° C.]=150×attachment energy [eV], 100×attachment energy [eV]−50, and 20° C., and attachment energies [eV]=2.1 and 0.5.

Claims (15)

1. A mass spectrometer system comprising:

a chamber having an ion emitting unit to emit metal ions in said chamber with a communicating hole; a molecule introduction unit which introduces neutral molecules into the chamber;

a gas introduction unit which introduces another gas into the chamber;

a control unit which controls a temperature of a region where the metal ions attach to the neutral molecules in the chamber; and

a mass analyzer which analyzes a mass of the neutral molecules having the metal ions attached and emitted from the communicating hole,

wherein said control unit, when plotting an attachment energy of the metal ions attached to the neutral molecules in the chamber along an abscissa and the temperature of the region where the metal ions attach to the neutral molecules along an ordinate, adjusts the temperature of the region so as to make the temperature fall within a range obtained by excluding a range corresponding to the temperature of the region from 150° C. to 200° C. (both inclusive) from a range surrounded by the temperatures of the region [° C.]=150×attachment energy [eV], 100×attachment energy [eV]−50, and 20° C., and attachment energies [eV]=2.1 and 0.5.

2. The mass spectrometer system according to claim 1 , wherein said control unit adjusts the temperature of the region so as to make the temperature fall within at least one of a range surrounded by the temperatures of the region [° C.]=150×attachment energy [eV] and 200° C. and the attachment energy [eV]=2.1 and a range surrounded by the temperatures of the region [° C.]=150×attachment energy [eV], 150° C., 100×attachment energy [eV]−50, and 20° C., and the attachment energy [eV]=0.5.

3. The mass spectrometer system according to claim 1 , wherein said control unit makes the temperature of the region lower than a temperature of a wall portion of the chamber.

4. The mass spectrometer system according to claim 1 , wherein said a molecule introduction unit introduces neutral gas phase molecules into the chamber by heating and vaporizing a solid/liquid sample.

5. The mass spectrometer system according to claim 1 , further comprising a heater which heats the chamber,

wherein said control unit controls to raise the temperature of the region by heating said heater and lower the temperature of the region by increasing an introduced amount of the other gas to the chamber.

6. The mass spectrometer system according to claim 1 , further comprising a cooling device which cools the other gas.

7. The mass spectrometer system according to claim 1 , further comprising a cooling device which cools the neutral molecules.

8. A mass spectrometry method in a mass spectrometer system that comprises a chamber having an ion emitting unit to emit metal ions in said chamber with a communicating hole; a molecule introduction unit which introduces neutral molecules into the chamber; a gas introduction unit which introduces another gas into the chamber; and a mass analyzer which analyzes a mass of the neutral molecules having the metal ions attached and emitted from the communicating hole, the method comprising the step of controlling a temperature of a region where the metal ions attach to the neutral molecules in the chamber,

wherein in the controlling step, plotting an attachment energy of the metal ions attached to the neutral molecules in the chamber along an abscissa and the temperature of the region where the metal ions attach to the neutral molecules along an ordinate, the temperature of the region is adjusted so as to make the temperature fall within a range obtained by excluding a range corresponding to the temperature of the region from 150° C. to 200° C. (both inclusive) from a range surrounded by the temperatures of the region [° C.]=150×attachment energy [eV], 100×attachment energy [eV]−50, and 20° C., and attachment energies [eV]=2.1 and 0.5.

Assignments (3)
MERGER Recorded Apr 21, 2010
From: CANON ANELVA ENGINEERING CORPORATION; CANON ANELVA TECHNIX CORPORATION
To: CANON ANELVA CORPORATION
Reel/Frame 024264/0403 →
CORRECTIVE ASSIGNMENT TO CORRECT THE SURNAME OF THE SECOND INVENTOR FROM --NAKAMAURA-- TO --NAKAMURA-- AS PREVIOUSLY RECORDED ON REEL 023910 FRAME 0289. ASSIGNOR(S) HEREBY CONFIRMS THE CORRECTIVE ASSIGNMENT. Recorded Mar 19, 2010
From: SHIOKAWA, YOSHIRO; NAKAMURA, MEGUMI; MARUYAMA, HARUMI
To: CANON ANELVA TECHNIX CORPORATION
Reel/Frame 024106/0463 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 8, 2010
From: SHIOKAWA, YOSHIRO; NAKAMAURA, MEGUMI; MARUYAMA, HARUMI
To: CANON ANELVA TECHNIX CORPORATION
Reel/Frame 023910/0289 →
Priority Claims (2)
JP 2008-335095 · Dec 26, 2008 · national
JP 2009-285722 · Dec 16, 2009 · national
Continuity (1)
Related Publication 20100163723A1 · Jul 1, 2010