Electretization method and apparatus
While a dielectric film is set to have a ground potential, a fixed electrode is set to have a different potential from the ground potential. Thereafter, ions produced by corona discharge are allowed to pass through a plurality of acoustic holes formed in the fixed electrode and reach the dielectric film, thereby electretizing the dielectric film.
1. A method for electretizing a dielectric film of a condenser microphone comprising a fixed electrode having a plurality of acoustic holes, a vibrating film placed so as to be opposed to the fixed electrode, and the dielectric film formed on the vibrating film so as to be located between the fixed electrode and the vibrating film, said method comprising the steps of:
(a) setting the dielectric film to have a ground potential;
(b) setting the fixed electrode to have a different potential from the ground potential; and
(c) allowing ions produced by corona discharge to pass through the plurality of acoustic holes formed in the fixed electrode and reach the dielectric film, thereby electretizing the dielectric film with the dielectric film being set to have the ground potential, and the fixed electrode being set to have the different potential.
2. The method of claim 1 , wherein
the condenser microphone is mounted on a substrate for packaging,
the step (a) includes the step of setting the dielectric film to have the ground potential through a first electrode formed on the substrate for packaging; and
the step (b) includes the step of setting the fixed electrode to have the different potential through a second electrode formed on the substrate for packaging.
3. The method of claim 1 , wherein
the step (a) includes the step of setting the dielectric film to have the ground potential through a first probe pin, and
the step (b) includes the step of setting the fixed electrode to have the different potential through a second probe pin.
4. The method of claim 1 , wherein the step (c) includes the step of causing the corona discharge using a wire electrode.
5. The method of claim 1 , wherein the step (c) includes the step of causing the corona discharge using a needle electrode.
6. The method of claim 1 , wherein the amount of electric charges deposited on the dielectric film in the step (c) is adjusted by the magnitude of the different potential of the fixed electrode in the step (b).
7. A condenser microphone comprising the dielectric film electretized by the method of claim 1 .
8. An electretization apparatus for electretizing a dielectric film of a condenser microphone comprising a fixed electrode having a plurality of acoustic holes, a vibrating film placed so as to be opposed to the fixed electrode, and the dielectric film formed on the vibrating film so as to be located between the fixed electrode and the vibrating film, said electretization apparatus comprising:
an electrode used to cause corona discharge;
a high voltage power source for applying a high voltage to the electrode;
a voltage supply for setting the fixed electrode to have a different potential from a ground potential;
a ground pin for setting the dielectric film to have the ground potential, the dielectric film being a film to be electretized; and
a voltage application pin for setting the fixed electrode to be electrically connected to the voltage supply.
9. The apparatus of claim 8 , wherein the voltage supply adjusts the magnitude of the different potential.
10. The apparatus of claim 8 , wherein said corona discharge is performed with the dielectric film being set to the ground potential and the fixed electrode being set to the different potential.