Semiconductor-on-diamond devices and associated methods
View Patent ↗Semiconductor-on-diamond (SOD) substrates and methods for making such substrates are provided. In one aspect, a method of making an SOD substrate may include depositing a base layer onto a lattice-orienting silicon (Si) substrate such that the base layer lattice is substantially oriented by the Si substrate, depositing a semiconductor layer onto the base layer such that the semiconductor layer lattice is substantially oriented with respect to the base layer lattice, and disposing a layer of diamond onto the semiconductor layer. The base layer may include numerous materials, including, without limitation, aluminum phosphide (Alp), boron arsenide (BAs), gallium nitride (GaN), indium nitride (InN), and combinations thereof. Additionally, the method may further include removing the lattice-orienting Si substrate and the base layer from the semiconductor layer. In one aspect, the Si substrate may be of a single crystal orientation.
1. A semiconductor-on-diamond device comprising:
a single crystal semiconductor layer having a lattice substantially oriented by a base layer upon which the semiconductor layer was previously deposited, said semiconductor layer including a member selected from the group consisting of AlN, GaN, and combinations thereof; and
a layer of diamond coupled directly to the semiconductor layer, wherein the diamond layer is located between a support substrate and the single crystal semiconductor layer.
2. The semiconductor-on-diamond device of claim 1 , wherein the single crystal semiconductor layer is a single crystal layer of AlN.
3. The semiconductor-on-diamond device of claim 2 , wherein the single crystal layer of AlN is a layer of cubic AlN.
4. The semiconductor-on-diamond device of claim 1 , wherein the single crystal semiconductor layer is a single crystal layer of GaN.
5. The semiconductor-on-diamond device of claim 4 , wherein single crystal layer of GaN is a layer of cubic GaN.
6. The semiconductor-on-diamond device of claim 1 , wherein the diamond layer is coupled to the support substrate.
7. The semiconductor-on-diamond device of claim 1 , wherein the device is an LED.
8. The semiconductor-on-diamond device of claim 1 , wherein the device is an acoustic filter.
9. The semiconductor-on-diamond device of claim 1 , wherein the device is a semiconductor substrate.
10. A semiconductor-on-diamond device comprising:
a single crystal semiconductor layer having a lattice substantially oriented by a base layer upon which the semiconductor layer was previously deposited, said semiconductor layer including a member selected from the group consisting of AlN, GaN, and combinations thereof; and
a layer of diamond coupled directly to the semiconductor layer, wherein the device is a semiconductor substrate.
11. The semiconductor-on-diamond device of claim 10 , wherein the single crystal semiconductor layer is a single crystal layer of AlN.
12. The semiconductor-on-diamond device of claim 11 , wherein the single crystal layer of AlN is a layer of cubic AlN.
13. The semiconductor-on-diamond device of claim 10 , wherein the single crystal semiconductor layer is a single crystal layer of GaN.
14. The semiconductor-on-diamond device of claim 13 , wherein single crystal layer of GaN is a layer of cubic GaN.
15. The semiconductor-on-diamond device of claim 10 , wherein the diamond layer is located between a support substrate and the single crystal semiconductor layer.
16. The semiconductor-on-diamond device of claim 10 , wherein the diamond layer is coupled to the support substrate.
17. A semiconductor-on-diamond device comprising:
a single crystal semiconductor layer having a lattice substantially oriented by a base layer upon which the semiconductor layer was previously deposited, said semiconductor layer including a member selected from the group consisting of AlN, GaN, and combinations thereof; and
a layer of diamond coupled directly to the semiconductor layer, wherein the device is an acoustic filter.
18. The semiconductor-on-diamond device of claim 17 , wherein the single crystal semiconductor layer is a single crystal layer of AlN.
19. The semiconductor-on-diamond device of claim 17 , wherein the single crystal semiconductor layer is a single crystal layer of GaN.
20. The semiconductor-on-diamond device of claim 17 , wherein the diamond layer is coupled to the support substrate.