Dual stage positioning and switching system
View Patent ↗The present invention has disclosed a dual stage positioning and switching system, which comprises at least a base, a first object stage positioning unit disposed on the base for a first workstation, and a second object stage positioning unit for a second workstation. Each of the object stage positioning units comprises at least a supporting structure, an X-direction guide bar, a Y-direction guide bar, and a motion positioning detector, wherein, the supporting structure comprises an object stage, and an object stage connector moving relative to the object stage. The object stage positioning unit further comprises a driver connecting to the object stage connector and driving the connector to move along the X-direction guide bar. The X-direction guide bars are positioned on and movable along the Y-direction guide bars. The system further comprises an object stage connector for transitional use during the switching process, which is positioned at the center of the Y-direction guide bar located on one side of the base. The present system does not include a cable stage, so that the structure of the system is simplified.
1. A dual stage positioning and switching system, comprising:
a base;
two object stage positioning units, disposed on said base and including a first object stage positioning unit for a first workstation and a second object stage positioning unit for a second workstation; and
a transitional object stage connector for transitional use during a switching process,
each of the two object stage positioning units comprising:
at least a supporting structure including an object stage and an object stage connector, said object stage being movable relative to said object stage connector,
an X-direction guide bar,
a Y-direction guide bar,
a motion positioning detector, and
a driver connecting to said object stage connector and driving said object stage connector to move along said X-direction guide bar,
said X-direction guide bar being positioned on and movable along said Y-direction guide bar, wherein
the transitional object stage connector is fixed at the center of said Y-direction guide bar located on one side of said base, and
the transitional object stage connector is configured to receive the object stage of one of the two object stage positioning units and then transfer, after the object stage of the other of the two object stage positioning units is transferred to the object stage connector of the one of the two object stage positioning units, the object stage of the one of the two object stage positioning units to the object stage connector of the other of the two object stage positioning units.
2. The dual stage positioning and switching system as claimed in claim 1 , characterized in that said first workstation is a pre-processing workstation, and said second workstation is an exposure workstation.
3. The dual stage positioning and switching system as claimed in claim 1 , characterized in that said object stage positioning unit is a wafer stage positioning unit.
4. The dual stage positioning and switching system as claimed in claim 1 , characterized in that said supporting structure is a wafer supporting structure.
5. The dual stage positioning and switching system as claimed in claim 1 , characterized in that said object stage is a wafer stage; said object stage connector is a wafer stage connector.
6. The dual stage positioning and switching system as claimed in claim 4 , characterized in that said supporting structure connects to said base via gas levitation or magnetic levitation.
7. The dual stage positioning and switching system as claimed in claim 4 , characterized in that said supporting structure further comprises a linear motor, a gas levitation bearing, a pair of circuit contacts, a fastener, and a vacuum pipeline unit; said object stage being connected to said object stage connector via said gas levitation bearing, said circuit contacts, and said fastener.
8. The dual stage positioning and switching system as claimed in claim 7 , characterized in that said vacuum pipeline unit comprises a vacuum pipeline and an energy storage device.
9. The dual stage positioning and switching system as claimed in claim 7 , characterized in that said gas levitation bearing is selected from the group consisting of vacuum preload gas levitation bearing and permanent magnetic preload gas levitation bearing.
10. The dual stage positioning and switching system as claimed in claim 1 , characterized in that said motion positioning detector is a laser interferometer.
11. The dual stage positioning and switching system as claimed in claim 1 , characterized in that a linear grating is positioned on at least one of said X-direction guide bars and at least one of said Y-direction guide bars.
12. The dual stage positioning and switching system as claimed in claim 1 , characterized in that said supporting structure connects to said base via gas levitation or magnetic levitation.
13. The dual stage positioning and switching system as claimed in claim 1 , characterized in that said supporting structure further comprises a linear motor, a gas levitation bearing, a pair of circuit contacts, a fastener, and a vacuum pipeline unit; said object stage being connected to said object stage connector via said gas levitation bearing, said circuit contacts, and said fastener.
14. The dual stage positioning and switching system as claimed in claim 13 , characterized in that said vacuum pipeline unit comprises a vacuum pipeline and an energy storage device.
15. The dual stage positioning and switching system as claimed in claim 13 , characterized in that said gas levitation bearing is selected from the group consisting of vacuum preload gas levitation bearing and permanent magnetic preload gas levitation bearing.