Apparatus for packaging semiconductor devices, packaged semiconductor components, methods of manufacturing apparatus for packaging semiconductor devices, and methods of manufacturing semiconductor components
Packaged semiconductor components, apparatus for packaging semiconductor devices, methods of packaging semiconductor devices, and methods of manufacturing apparatus for packaging semiconductor devices. One embodiment of an apparatus for packaging semiconductor devices comprises a first board having a front side, a backside, arrays of die contacts, arrays of first backside terminals electrically coupled to the die contacts, arrays of second backside terminals, and a plurality of individual package areas that have an array of the die contacts, an array of the first backside terminals, and an array of the second backside terminals. The apparatus further includes a second board having a first side laminated to the front side of the first board, a second side, openings through the second board aligned with individual package areas that define die cavities, and arrays of front contacts at the second side electrically coupled to the second backside terminals by interconnects extending through the first board and the second board.
1. A method of packaging semiconductor devices, comprising:
attaching a first side of a riser board to a front side of a base board, wherein die cavities are formed by individual openings in the riser board that are aligned with corresponding individual package areas of the base board, and wherein the base board has die contacts and first backside terminals on a backside of the base board electrically coupled to the die contacts;
forming a plurality of through package vias extending through the riser board and the base board after attaching the first side of the riser board to the front side of the base board; and
depositing a conductive material in the through package vias, wherein the conductive material forms through package interconnects that electrically couple front side contacts at a second side of the riser board to corresponding second backside terminals on a backside of the base board.
2. The method of claim 1 wherein before attaching the riser board to the base board, the method further comprises attaching an adhesive to the first side of the riser board and punching the openings through the riser board and the adhesive.
3. The method of claim 1 wherein the base board comprises a first printed circuit board and the riser board comprises a second printed circuit board, and wherein the method further comprises aligning the front side contacts of the riser board with the second backside terminals of the base board and pressing the first side of the riser board and the front side of the base board against an adhesive.
4. The method of claim 3 wherein forming the through package vias comprises drilling holes through the riser board and the base board.
5. The method of claim 1 wherein:
the method further comprises aligning the front side contacts of the riser board with the second backside terminals of the base board and pressing the first side of the riser board and the front side of the base board against an adhesive; and
forming the through package vias comprises drilling holes through corresponding pairs of front side contacts and second backside terminals.
6. The method of claim 1 wherein:
the method further comprises aligning the front side contacts of the riser board with the second backside terminals of the base board and pressing the first side of the riser board and the front side of the base board against an adhesive;
forming the through package vias comprises drilling holes through corresponding pairs of front side contacts and second backside terminals; and
depositing a conductive material in the through package vias comprises plating a metal into the holes.
7. The method of claim 1 wherein:
before attaching the riser board to the base board, the method further comprises forming circuitry on the second side of the riser board, attaching an adhesive to the first side of the riser board, and punching the opening through the riser board and the adhesive; and
attaching the riser board to the base board comprises pressing the adhesive at the first side of the riser board against the front side of the base board while the openings are aligned with corresponding individual package areas.
8. The method of claim 7 wherein the front side contacts at the second side are superimposed relative to corresponding second backside terminals of the base board, and forming the vias comprises drilling holes at the front side contacts that extend to corresponding backside contacts.
9. The method of claim 8 wherein depositing the conductive material in the vias comprises plating a metal into the holes.
10. A method of manufacturing semiconductor components, comprising:
providing an apparatus in which a plurality of dies are to be packaged, the apparatus comprising—
a first board having a front side, a backside, arrays of die contacts, arrays of first backside terminals electrically coupled to the die contacts, arrays of second backside terminals, and a plurality of individual package areas that have an array of the die contacts, an array of the first backside terminals, and an array of the second backside terminals, and
a second board having a first side laminated to the front side of the first board, a second side, openings through the second board aligned with individual package areas that define die cavities, and arrays of front contacts at the second side electrically coupled to the second backside terminals by through package interconnects extending through the first board and the second board, wherein the through package interconnects are formed after attaching the front side of the first board to the first side of the second board;
positioning semiconductor dies in the die cavities;
electrically coupling bond-pads on the dies to corresponding die contacts of the first board; and
depositing protective material into the die cavities.
11. The method of claim 10 wherein electrically coupling the bond-pads on the dies to the die contacts comprises wire-bonding the bond-pads to the die contacts.
12. The method of claim 10 wherein electrically coupling the bond-pads on the dies to the die contacts comprises flip-chip mounting the bond-pads onto the die contacts.
13. The method of claim 10 wherein:
the first board has slots and the die contacts are arranged in arrays at the backside of the first board proximate to the slots;
the dies have an active side attached to the front surface of the first board such that bond-pads on the dies are aligned with a corresponding slot; and
electrically coupling the bond-pads on the dies to the die contacts comprises forming wire-bonds that extend through the slots from the bond-pads to the die contacts.
14. The method of claim 10 , further comprising cutting the first and second boards between the individual package areas, wherein individual packaged semiconductor components are separated from each other.
15. The method of claim 14 , further comprising testing the individual packaged semiconductor components and stacking only known-good-packaged semiconductor components on each other.
16. The method of claim 15 wherein stacking comprises electrically coupling front side contacts of a first packaged semiconductor component with corresponding second backside terminals of a second packaged semiconductor component stacked on the first packaged semiconductor component.
17. The method of claim 10 , further comprising testing the individual packaged semiconductor components before cutting the first board and the second board to determine known-good-packages.
18. The method of claim 17 , further comprising cutting the first and second boards between the individual package areas and stacking only known-good-packaged semiconductor components on each other.
19. The method of claim 18 wherein stacking comprises electrically coupling front side contacts of a first packaged semiconductor component with corresponding second backside terminals of a second packaged semiconductor component stacked on the first packaged semiconductor component.
20. The method of claim 16 further comprising coupling the second side of the second board of the first packaged semiconductor component with the backside of the first board of the second packaged semiconductor component stacked on the first packaged semiconductor component via solder balls between the first and second packaged semiconductor components.
21. The method of claim 10 further comprising at least partially encapsulating the semiconductor dies in a protective material.