Wafer grinding machine and wafer grinding method
A wafer grinding machine and a wafer grinding method are disclosed. A barrier ( 60 ) is arranged around a holding unit ( 29 ) to hold at least a wafer ( 40 ) with a film ( 11 ) attached on the front surface ( 41 ) thereof and with the back surface ( 42 ) thereof directed upward. The upper surface ( 61 ) of the barrier unit is ground to the position between the back surface of the wafer held by the holding unit and the boundary between the wafer and the film. Then, the wafer is ground while being held with the back surface thereof up by the holding unit. As a result, the film is prevented from coming off from the wafer at the time of grinding the back surface of the wafer. Further, when the wafer is ground, a fluid may be supplied into the gap between the barrier unit and the outer peripheral portion of the wafer held by the holding unit.
1. A wafer grinding method comprising the steps of:
arranging a barrier unit around a holding means adapted to hold a wafer with a film attached on a front surface thereof, wherein a back surface of the wafer is directed upward;
grinding an upper surface of the barrier unit to a height between the front surface of the wafer and the back surface of the wafer held by the holding means;
holding the wafer with the back surface thereof directed upward by the holding means; and
grinding the back surface of the wafer.
2. The wafer grinding method according to claim 1 ,
wherein the step of grinding the wafer includes the step of supplying a fluid into a gap between the barrier unit and an outer peripheral portion of the wafer held by the holding means.