Semiconductor device manufacturing method using valve metal and nitride of valve metal
Provided is a semiconductor device which has excellent adhesiveness to a copper film and a base film thereof and has a small resistance between wirings. The semiconductor device includes a porous insulating layer (SIOC film 11 ) which absorbed water from the atmosphere, and a substrate (wafer W) having a trench 100 formed on such insulating film is placed in a processing chamber. The substrate is coated with a first base film (Ti film 13 ) made of a valve metal. The surface of the first film brought into contact with the insulating film is oxidized by the water discharged from the insulating layer, and a passivation film 13 a is formed. The surface of the first base film is coated with a second base film made of nitride or carbide of the valve metal, and a copper film 15 is formed on the surface of the second base film by CVD by using a copper organic compound as a material.
1. A semiconductor device manufacturing method comprising:
coating a first base film made of a first valve metal on a surface of a porous insulating film formed on a substrate;
coating a second base film made of nitride or carbide of a second valve metal on a surface of the first base film;
loading the substrate having the base films into an airtightly sealed processing chamber;
forming a copper film on a surface of the second base film by supplying a source gas containing a copper organic compound into the processing chambers; and
forming a passivation film made of oxide of the first valve metal between the insulating film and the first base film from a portion of the first base film and water included in the insulating film while maintaining the substrate having the first base film at a predetermined temperature.
2. The semiconductor device manufacturing method of claim 1 , wherein each of the first valve metal and the second valve metal is selected from the group of valve metals consisting of titanium, tantalum, aluminum, niobium, hafnium, zirconium, zinc, tungsten, bismuth and antimony.
3. The semiconductor device manufacturing method of claim 1 , wherein the first valve metal and the second valve metal are a same valve metal.
4. The semiconductor device manufacturing method of claim 1 , wherein the insulating film is an insulating film containing silicon, oxygen and carbon.
5. A storage medium storing a computer program for performing a semiconductor device manufacturing method on a computer, wherein the semiconductor device manufacturing method includes:
coating a first base film made of a first valve metal on a surface of a porous insulating film formed on a substrate;
coating a second base film made of nitride or carbide of a second valve metal on a surface of the first base film;
loading the substrate having the base films into an airtightly sealed processing chamber;
forming a copper film on a surface of the second base film by supplying a source gas containing a copper organic compound into the processing chamber; and
forming a passivation film made of oxide of the first valve metal between the insulating film and the first base film from a portion of the first base film and water included in the insulating film while maintaining the substrate having the first base film at a predetermined temperature.