Apparatus having a lanthanum-metal oxide semiconductor device
Lanthanum-metal oxide dielectrics and methods of fabricating such dielectrics provide an insulating layer in a variety of structures for use in a wide range of electronic devices and systems. In an embodiment, a lanthanum-metal oxide dielectric is formed using a trisethylcyclopentadionatolanthanum precursor and/or a trisdipyvaloylmethanatolanthanum precursor. Additional apparatus, systems, and methods are disclosed.
1. An apparatus comprising:
a substrate; and
a dielectric material disposed above the substrate, the dielectric material containing a region of lanthanum-metal oxide, the lanthanum-metal oxide having an oxide composition without nitrogen, the metal of the lanthanum-metal oxide being a metal other than lanthanum, the lanthanum-metal oxide doped with a lanthanide other than lanthanum.
2. The apparatus of claim 1 , wherein the lanthanum-metal oxide is structured as one or more monolayers.
3. The apparatus of claim 1 , wherein the dielectric material consists essentially of the region.
4. The apparatus of claim 1 , wherein the dielectric material includes a stack of insulating materials in addition to the region.
5. The apparatus of claim 1 , wherein the dielectric material includes a dielectric metal oxide.
6. The apparatus of claim 5 , wherein the dielectric metal oxide includes a metal different from the metal in the lanthanum-metal oxide.
7. The apparatus of claim 5 , wherein the dielectric metal oxide includes a lanthanide oxide consisting essentially of the lanthanide of the lanthanide oxide and oxygen.
8. The apparatus of claim 1 , wherein the dielectric material includes a dielectric nitride or a dielectric metal silicate.
9. The apparatus of claim 1 , wherein the dielectric material includes an insulating non-lanthanide oxide.
10. The apparatus of claim 1 , wherein the apparatus includes an interfacial region connecting the dielectric material to the substrate, the interfacial region including a lanthanum silicate, a metal silicate comprising the metal of the lanthanum-metal oxide, or a lanthanum metal silicate comprising the metal of the lanthanum-metal oxide.
11. The apparatus of claim 1 , wherein the apparatus includes a metal electrode contacting the lanthanum-metal oxide, the metal electrode having a composition such that the metal electrode essentially does not undergo an interface reaction with the lanthanum-metal oxide.
12. The apparatus of claim 11 , wherein the metal electrode contacting the lanthanum-metal oxide includes ruthenium.
13. The apparatus of claim 1 , wherein the metal of the lanthanum-metal oxide is aluminum.
14. The apparatus of claim 1 , wherein the dielectric material is disposed as a gate insulator in a silicon complementary metal-oxide semiconductor (CMOS) device.
15. The apparatus of claim 1 , wherein the dielectric material is disposed as a capacitor in an integrated circuit, the integrated circuit configured as an analog integrated circuit, a radio frequency (RF) integrated circuit, or a mixed signal integrated circuit.
16. The apparatus of claim 1 , wherein the dielectric material is disposed as a gate insulator or an inter-gate insulator in a transistor.
17. An apparatus comprising:
a substrate; and
a memory device disposed on the substrate, the memory device having a dielectric material disposed above the substrate, the dielectric material containing a region of lanthanum-metal oxide, the lanthanum-metal oxide having an oxide composition without nitrogen, the metal of the lanthanum-metal oxide being a metal other than lanthanum, the lanthanum-metal oxide doped with a lanthanide other than lanthanum.
18. The apparatus of claim 17 , wherein the dielectric material is disposed as a gate insulator or an inter-gate insulator in a transistor of a flash memory device.
19. The apparatus of claim 17 , wherein the dielectric material is disposed as a charge-storing nanolaminate dielectric in a flash memory device.
20. The apparatus of claim 17 , wherein the dielectric material is disposed as a capacitor dielectric in a capacitor in a dynamic random access memory.