Mask layout and method for forming vertical channel transistor in semiconductor device using the same
A method for forming a vertical channel transistor in a semiconductor memory device includes: forming a plurality of pillars over a substrate so that the plurality of pillars are arranged in a first direction and a second direction crossing the first direction, and so that each of the pillars has a hard mask pattern thereon; forming an insulation layer to fill a regions between the pillars; forming a mask pattern over a resultant structure including the insulation layer, wherein the mask pattern has openings exposing gaps between each two adjacent pillars in the first direction; etching the insulation layer to a predetermined depth using the mask pattern as an etching barrier to form trenches; and filling the trenches with a conductive material to form word lines extending in the first direction.
1. A mask layout for forming a word line of a vertical channel transistor including a plurality of pillars arranged in a first direction and a second direction crossing the first direction, the mask layout comprising openings only exposing gaps between each two adjacent pillars of the plurality of pillars and covering the other portions in the first direction.
2. The mask layout of claim 1 , wherein a width of the openings in the first direction is greater by a predetermined value than a distance between each two adjacent pillar of the plurality of pillars in the first direction.
3. The mask layout of claim 2 , wherein the predetermined value is greater than 0 nm but not greater than approximately 20 nm.
4. The mask layout of claim 1 , wherein the openings have a length in the second direction smaller than a width of each of the pillars in the second direction.
5. The mask layout of claim 1 , wherein the openings have a shape of a bar or a box.