Protection layer for adhesive material at wafer edge
View Patent ↗This description relates to a semiconductor device including a wafer having a first surface and a second surface opposite to the first surface and a carrier attached to the first surface of the wafer by an adhesive layer, a portion of the adhesive layer adjacent to an edge of the wafer is exposed. The semiconductor device further includes a protection layer to cover the exposed portion of the adhesive layer. The semiconductor device further includes a plurality of dies attached to the second surface and a molding compound encapsulating the plurality of dies.
1. A semiconductor device, comprising:
a wafer having a first surface and a second surface opposite to the first surface;
a carrier attached to the first surface of the wafer by an adhesive layer, a portion of the adhesive layer adjacent to an edge of the wafer is exposed;
a protection layer to cover the exposed portion of the adhesive layer;
a plurality of dies attached to the second surface; and
a molding compound encapsulating the plurality of dies.
2. The semiconductor device of claim 1 , wherein the protection layer covers a portion of the carrier.
3. The semiconductor device of claim 1 , wherein the protection layer covers the second surface of the wafer.
4. The semiconductor device of claim 1 , wherein the protection layer covers an edge of the wafer and exposes at least a portion of the second surface of the wafer.
5. The semiconductor device of claim 1 , wherein the protection layer comprises at least one of an oxide film, a nitride film, a carbide film, a polymer-based material, a resin-based material, polyimide, or a spin-on material.
6. The semiconductor device of claim 1 , wherein the molding compound comprises at least one of a polymer-based material, a resin-based material, silicon oxide, an epoxy, or benzocyclobutene.
7. The semiconductor device of claim 1 , wherein the plurality of dies comprises at least one of a memory chip, a radio frequency chip, or a logic chip.
8. A semiconductor device, comprising:
a wafer having a first surface and a second surface opposite to the first surface;
a carrier attached to the first surface of the wafer by an adhesive layer;
a protection layer over any portion of the adhesive layer exposed by the wafer and the carrier;
a plurality of dies attached to the second surface of the wafer; and
a molding compound encapsulating the plurality of dies.
9. The semiconductor device of claim 8 , wherein the protection layer covers a portion of the carrier.
10. The semiconductor device of claim 8 , wherein the protection layer covers the second surface of the wafer.
11. The semiconductor device of claim 8 , wherein the protection layer covers an edge of the wafer and exposes at least a portion of the second surface of the wafer.
12. The semiconductor device of claim 8 , wherein the protection layer comprises at least one of an oxide film, a nitride film, a carbide film, a polymer-based material, a resin-based material, polyimide, or a spin-on material.
13. The semiconductor device of claim 8 , wherein the molding compound comprises at least one of a polymer-based material, a resin-based material, silicon oxide, an epoxy, or benzocyclobutene.
14. The semiconductor device of claim 8 , wherein the plurality of dies comprises at least one of a memory chip, a radio frequency chip, or a logic chip.