Production method for a magnetostrictive torque sensor
A method produces a magnetostrictive torque sensor which detects a steering torque applied to a steering shaft by electrically detecting distortion of magnetostrictive films provided on a surface of the steering shaft. A plating step forms the magnetostrictive film on the surface of the steering shaft, and a heat treatment step heat treats the magnetostrictive film on the steering shaft. During the heat treatment step, hydrogen in the magnetostrictive film is decreased so that a hydrogen desorbing peak around 120° C. disappears when the magnetostrictive film is heated after the heat treatment step.
1. A production method for a magnetostrictive torque sensor which detects steering torque applied to a steering shaft by electrically detecting distortion of a magnetostrictive film on a surface of the steering shaft, comprising:
a plating step of forming the magnetostrictive film on the surface of the steering shaft; and
a heat treatment step of heat treating the magnetostrictive film on the surface of the steering shaft;
wherein the heat treatment step includes a heat treatment process for decreasing hydrogen included in the magnetostrictive film so that a hydrogen desorbing peak around 120° C. from the magnetostrictive film disappears when the magnetostrictive film is heated after the heat treatment step.
2. The production method for the magnetostrictive torque sensor according to claim 1 , wherein the magnetostrictive film is produced by the heat treatment step in which the magnetostrictive film is heated up to 400° C. for between 1 and 10 seconds.
3. The production method for the magnetostrictive torque sensor according to claim 1 , wherein the heat treatment step includes a heat treatment process performed by high frequency heating and an annealing process performed for the steering shaft after the heat treatment process.