Pad bonding employing a self-aligned plated liner for adhesion enhancement
Two substrates are brought together and placed in a plating bath. In one embodiment, a conductive material is plated in microscopic cavities present at the interface between a first metal pad and a second metal pad to form at least one interfacial plated metal liner portion that adheres to a surface of the first metal pad and a surface of the second metal pad. In another embodiment, at least one metal pad is recessed relative to a dielectric surface before being brought together. The two substrates are placed in a plating bath and a conductive material is plated in the cavity between the first metal pad and the second metal pad to form a contiguous plated metal liner layer that adheres to a surface of the first metal pad and a surface of the second metal pad.
1. A bonded structure comprising:
a first substrate including at least one first metal pad embedded in a first dielectric material layer;
a second substrate including at least one second metal pad, wherein said at least one second metal pad is not in contact with said at least one first meal pad and said at least one second metal pad is embedded in a second dielectric material layer in contact with said first dielectric material layer; and
at least one means for bonding said first substrate and said second substrate, wherein each of said at least one means for bonding said first substrate and said second substrate is embodied as a contiguous metal liner layer contacting a first surface of one of said at least one first metal pad and a second surface of one of said at least one second metal pad and, and said contiguous metal liner layer has a periphery that vertically coincides with a periphery of said one of said at least one first metal pad.
2. The bonded structure of claim 1 , said contiguous metal liner layer contacts said one of said at least one second metal pad in a plane within which said second dielectric material layer contacts said first dielectric material layer.
3. The bonded structure of claim 1 , wherein a plane at which said second dielectric material layer contacts said first dielectric material layer is different from a plane of said first surface and from a plane of said second surface.
4. The bonded structure of claim 3 , wherein said contiguous metal liner layer has another periphery that vertically coincides with a periphery of said one of said at least one second metal pad, wherein said periphery of said contiguous metal liner layer does not vertically coincide with said another periphery of said contiguous metal liner.
5. The bonded structure of claim 1 , wherein said contiguous metal liner layer is composed of an electroplatable material or an electroless-platable material.
6. The bonded structure of claim 1 , wherein said at least one first metal pad is embedded in said first dielectric material layer and said at least one second metal pad is embedded in said second dielectric material layer, and each of said first and second substrates includes at least one semiconductor device.