Semiconductor device and method of fabricating the same
A semiconductor device includes an isolation layer defining an active region formed in a semiconductor substrate. A first recessing process is performed on the isolation layer to expose edge portions of the active region. A first rounding process is performed to round the edge portions of the active region. A second recessing process is performed on the isolation layer. A second rounding process is performed to round the edge portions of the active region.
1. A semiconductor device comprising:
an isolation layer recessed from a surface of a semiconductor substrate; and
an active region included in the semiconductor substrate defined by the isolation layer, the active region protruding upward with respect to the isolation layer,
wherein the active region includes a top surface and a side surface that has at least two bend points.
2. The semiconductor device of claim 1 , wherein one of the bend points is adjacent to the top surface of the isolation layer.
3. The semiconductor device of claim 1 , further comprising a finfet gate structure disposed on the active region.
4. The semiconductor device of claim 1 , wherein the top surface of the active region has a round shape.
5. The semiconductor device of claim 1 , wherein another of the bend points is located between the top surface of the active region and the side surface of the active region.
6. The semiconductor device of claim 1 , wherein a slope of the side surface changes at each of the bend points of the side surface
7. The semiconductor device of claim 1 , wherein the side surface of the active region comprises a first side surface on the first bend point and a second side surface under the first bend point.
8. The semiconductor device of claim 7 , wherein the first side surface and the second side surface have different slopes.
9. A semiconductor device comprising:
an isolation layer recessed from a surface of a semiconductor substrate;
an active region included in the semiconductor substrate defined by the isolation layer; and
a finfet gate structure disposed on the active region, the active region protruding upward with respect to the isolation layer,
wherein a side surface of the active region has at least two bend points.
10. The semiconductor device of claim 9 , wherein one of the bend points is adjacent to a top surface of the isolation layer.
11. The semiconductor device of claim 9 , wherein the top surface of the active region has a round shape.
12. The semiconductor device of claim 9 , wherein another of the bend points is located between the top surface of the active region and the side surface of the active region.
13. The semiconductor device of claim 9 , wherein a slope of the side surface changes at each of the bend points of the side surface
14. The semiconductor device of claim 9 , wherein the side surface of the active region comprises a first side surface on the first bend point and a second side surface under the first bend point.
15. The semiconductor device of claim 14 , wherein the first side surface and the second side surface have different slopes.
16. The semiconductor device of claim 9 , where the at least two bend points comprise a first bend point adjacent to a top surface of the isolation layer and a second bend point.
17. The semiconductor device of claim 16 , wherein a first slope of the side surface of the active region protruding upward with respect to the isolation layer changes from a second slope of the side surface of the active region defined by the isolation layer at the first bend point of the side surface.
18. The semiconductor device of claim 16 , wherein a first slope of the side surface of the active region adjacent to the top surface of the active region changes from a first slope of the side surface of the active region protruding upward with respect to the isolation layer.
19. The semiconductor device of claim 1 , wherein the active region comprises semiconductor material.
20. The semiconductor device of claim 1 , wherein at least one doped region is formed in the active region.