Full silicidation prevention via dual nickel deposition approach
Semiconductor devices are formed without full silicidation of the gates and with independent adjustment of silicides in the gates and source/drain regions. Embodiments include forming a gate on a substrate, forming a nitride cap on the gate, forming a source/drain region on each side of the gate, forming a first silicide in each source/drain region, removing the nitride cap subsequent to the formation of the first silicide, and forming a second silicide in the source/drain regions and in the gate, subsequent to removing the nitride cap. Embodiments include forming the first silicide by forming a first metal layer on the source/drain regions and performing a first RTA, and forming the second silicide by forming a second metal layer on the source/drain regions and on the gate and performing a second RTA.
1. A method comprising:
forming a gate on a substrate;
forming a nitride cap on the gate;
forming a source/drain region on each side of the gate;
forming a first silicide in each source/drain region;
removing the nitride cap subsequent to the formation of the first silicide; and
forming a second silicide in the source/drain regions and in the gate, subsequent to removing the nitride cap,
wherein, after forming the second silicide, silicide formed in the source/drain regions has a thickness that is greater than silicide formed in the gate.
2. The method according to claim 1 , comprising:
forming the first silicide by forming a first metal layer on the source/drain regions and performing a first rapid thermal anneal (RTA); and
forming the second silicide by forming a second metal layer on the source/drain regions and in the gate and performing a second RTA.
3. The method according to claim 2 , comprising forming the first metal layer to a first thickness and the second metal layer to a second thickness, the first thickness being 20% to 50% of the sum of the first and second thicknesses.
4. The method according to claim 3 , comprising forming the first and the second metal layers to a combined thickness of 100 nanometers (nm) to 300 nm.
5. The method according to claim 4 , comprising forming the first silicide by performing the first RTA at a first temperature of 200° C. to 400° C. and the second RTA at a second temperature of 400° C. to 600° C.
6. The method according to claim 5 , comprising forming the first silicide to a thickness of 50 nm to 200 nm in the source/drain regions and forming the second silicide to a thickness of 100 nm to 300 nm in source/drain regions and in the upper portion of the gate.
7. The method according to claim 6 , comprising removing the nitride cap by dry etching.
8. The method according to claim 7 , comprising forming halo/extension regions in the substrate on each side of the gate prior to removing the nitride cap.
9. The method according to claim 8 , comprising forming the source/drain regions by growing embedded silicon germanium (eSiGe) in the substrate.
10. The method according to claim 9 , comprising forming the gate by forming a high-k/metal gate, and comprising forming the first and the second metal layers including nickel (Ni) or Ni alloy.
11. The method according to claim 1 , comprising forming the second silicide in only the top 5% to 30% of the gate.
12. The method according to claim 1 , wherein the gate is not fully silicided by the formation of the second silicide.
13. A method comprising:
forming a high-k/metal gate on a substrate;
forming a nitride cap on the gate;
forming an embedded silicon germanium (eSiGe) source/drain region on each side of the gate;
forming halo/extension regions in the substrate on each side of the gate;
depositing a first layer including nickel (Ni) or Ni alloy on the source/drain regions;
performing a first rapid thermal anneal (RTA) at a temperature of 200° C. to 400° C., to form a first silicide;
removing the nitride cap by dry etching subsequent to the first RTA;
depositing a second layer including Ni or Ni alloy on the source/drain regions and on the gate, subsequent to removing the nitride cap;
performing a second RTA at a temperature of 400° C. to 600° C., to form a second silicide,
wherein a thickness of the first layer including Ni or Ni alloy is 20% to 50% of a combined thickness of the first and the second layers including Ni or Ni alloy, and the combined thickness of the layers including Ni or Ni alloy is 100 nm to 300 nm, and
wherein, after performing the second RTA, silicide formed in the source/drain regions has a thickness that is greater than silicide formed in the gate.
14. The method according to claim 13 , comprising forming the second silicide in only the top 5% to 30% of the gate.