Optical member, optical system using the optical member, and method of manufacturing an optical member
Provided is an optical member capable of keeping a high performance antireflection effect over a long period of time with respect to an arbitrary substrate. The optical member has plural layers on a substrate, and includes at least one metal oxide layer having a void, and at least one layer containing an organic resin as a main component formed between the substrate and the metal oxide layer. The metal oxide layer is a plate crystal layer formed of a plate crystal containing aluminum oxide as a main component and a surface of the plate crystal layer has an uneven profile. The organic resin has an aromatic ring and/or a hetero ring in at least a part thereof.
1. A method of manufacturing an optical member, the method comprising:
forming a layer containing an organic resin as a main component on a substrate by applying to the substrate a solution containing the organic resin, the organic resin having an aromatic ring and/or an imide ring in a main chain;
forming a layer containing aluminum oxide as a main component on the layer containing the organic resin; and
subjecting the layer containing aluminum oxide as a main component to hot water treatment to form unevenness on a surface.
2. The method of claim 1 , wherein the step of subjecting the layer containing aluminum oxide as a main component to hot water treatment comprises a step of forming a crystal containing a hydroxide of aluminum or a hydrate of aluminum oxide.
3. The method of claim 2 , wherein the crystal containing a hydroxide of aluminum or a hydrate of aluminum oxide is boehmite.
4. The method of claim 1 , wherein the hot water treatment comprises soaking in hot water at 50° C. or higher or exposure to water vapor.
5. The method of claim 1 , wherein the refractive index nb of the substrate, the refractive index ni of the layer containing an organic resin as a main component, and the refractive index ns of the layer containing aluminum oxide as a main component after the hot water treatment satisfy nb≧ni≧ns.
6. A method of manufacturing an optical member, the method comprising:
forming a layer containing a polyimide as a main component on a substrate by applying to the substrate a solution containing the polyimide;
forming a layer containing aluminum oxide as a main component on the layer containing the polyimide; and
subjecting the layer containing aluminum oxide as a main component to hot water treatment to form unevenness on a surface.
7. The method of claim 6 , wherein the step of subjecting the layer containing aluminum oxide as a main component to hot water treatment comprises a step of forming a crystal containing a hydroxide of aluminum or a hydrate of aluminum oxide.
8. The method of claim 7 , wherein the crystal containing a hydroxide of aluminum or a hydrate of aluminum oxide is boehmite.
9. The method of claim 6 , wherein the hot water treatment comprises soaking in hot water at 50° C. or higher or exposure to water vapor.
10. The method of claim 6 , wherein the refractive index nb of the substrate, the refractive index ni of the layer containing an organic resin as a main component, and the refractive index ns of the layer containing aluminum oxide as a main component after the hot water treatment satisfy nb≧ni≧ns.