Semiconductor device with buried gates
A method for manufacturing a semiconductor device comprises forming a buried gate after forming an active region to have a line type. The buried gate comprises an operation gate and a non-operation gate. A height of a gate electrode layer (conductive material) of the non-operation gate is formed to be lower than that of a gate electrode layer of the operation gate, thereby increasing a threshold voltage and preventing an overlap of the ion-implanted active region with the non-operation gate. As a result, a Gate Induced Drain Leakage (GIDL) is prevented to improve a refresh characteristic of the semiconductor device.
1. A semiconductor device comprising:
a device isolation region that defines an active region in a semiconductor substrate;
an active gate formed within a first recess of the semiconductor substrate; and
a dummy gate formed to be lower than a surface of the semiconductor substrate and formed within a second recess of the semiconductor substrate,
wherein a height of a conductive material of the dummy gate is lower than that of the active gate.
2. The semiconductor device according to claim 1 , wherein the active region has a line pattern.
3. The semiconductor device according to claim 1 , wherein the conductive material includes any of polysilicon, aluminum (Al), tungsten (W), tungsten nitride (WN), titanium (Ti), titanium nitride (TiN) and a combination thereof.
4. The semiconductor device according to claim 1 , wherein the active gate and the dummy gate have a line pattern.