Multilayer wiring substrate and method of manufacturing the same
The multilayer wiring substrate includes: a first insulating layer comprising a first surface and a second surface opposite to the first surface; a second insulating layer on the first surface of the first insulating layer; a first wiring pattern on the second surface of the first insulating layer; a second wiring pattern on a surface of the second insulating layer; a first via formed through the first insulating layer; a second via formed through the second insulating layer; and a third wiring pattern formed on the first surface of the first insulating layer and embedded in the second insulating layer, the third wiring pattern having a hole therethrough. A diameter of the hole is smaller than each diameter of the first and second vias. The first via and the second via are connected to each other through a metal filled in the hole of the third wiring pattern.
1. A multilayer wiring substrate, comprising:
a first insulating layer comprising a first surface and a second surface opposite to the first surface;
a second insulating layer on the first surface of the first insulating layer;
a first wiring pattern on the second surface of the first insulating layer;
a second wiring pattern on a surface of the second insulating layer, the second wiring pattern being opposed to the first wiring pattern;
a first via formed through the first insulating layer and electrically connected to the first wiring pattern;
a second via formed through the second insulating layer and electrically connected to the second wiring pattern, the second via being opposed to the first via; and
a third wiring pattern formed on the first surface of the first insulating layer and embedded in the second insulating layer, the third wiring pattern having a hole therethrough, and
wherein the first via and the second via are connected to each other through a metal filled in the hole of the third wiring pattern,
wherein the third wiring pattern comprises a first surface and a second surface opposite to the first surface,
wherein a diameter of the first via is gradually decreased toward the first surface of the third wiring pattern, and the first via comprises:
a top surface contacting the first wiring pattern; and
a bottom surface opposite to the top surface and contacting the first surface of the third wiring pattern,
wherein a diameter of the second via is gradually decreased toward the second surface of the third wiring pattern, and the second via comprises:
a top surface contacting the second wiring pattern; and
a bottom surface opposite to the top surface and contacting the second surface of the third wiring pattern, and
wherein a diameter of the hole is smaller than the bottom surfaces of the first via and the second via.
2. The substrate according to claim 1 ,
wherein the diameter of the hole is gradually increased toward the first and second surfaces of the third wiring pattern.
3. The substrate according to claim 1 , wherein a maximum value of the diameter of the hole is more than twice a minimum value thereof.
4. The substrate according to claim 1 , wherein the diameter of the hole is gradually decreased in a direction from the first surface of the third wiring pattern to the second surface thereof.