Method of manufacturing semiconductor modules and semiconductor module
A semiconductor module having an integrated structure is manufactured by mounting a semiconductor chip on the side of a surface of a cooling plate via an insulating material, and by molding the semiconductor chip and the cooling plate by a resin-molded member. This method includes the steps of: (a) forming a sprayed insulating film as the insulating material on a surface of the cooling plate; (b) forming a sprayed conductive film on a face of the sprayed insulating film opposite to a face where the cooling plate is provided; (c) checking whether the sprayed conductive film is insulated from the cooling plate by using the sprayed conductive film and the cooling plate as electrodes and applying voltage therebetween; and (d) mounting the semiconductor chip on the upper side of the sprayed conductive film when the sprayed conductive film is insulated, and then resin-molding the semiconductor chip and the cooling plate.
1. A method of manufacturing a semiconductor module having an integrated structure, by preparing a cooling plate and mounting a semiconductor chip formed with a semiconductor power element on a side of a surface of the cooling plate via an insulating material, and by molding the semiconductor chip and the cooling plate by a resin-molded member for integration, comprising the steps of:
(a) forming a sprayed insulating film as the insulating material on the side of the surface of the cooling plate;
(b) forming a sprayed conductive film on a face of the sprayed insulating film opposite to a face where the cooling plate is provided;
(c) checking whether or not the sprayed conductive film is insulated from the cooling plate by using the sprayed conductive film and the cooling plate as electrodes and applying voltage between the sprayed conductive film and the cooling plate; and
(d) mounting the semiconductor chip on an upper side of the sprayed conductive film when the sprayed conductive film is insulated from the cooling plate, and then resin-molding the semiconductor chip and the cooling plate by the resin-molded member for integration.
2. The method according to claim 1 , wherein,
in step (d), the semiconductor chip is arranged on a surface of the sprayed conductive film via a metal block.
3. The method according to claim 1 , wherein,
in step (d), the semiconductor chip is directly arranged on a surface of the sprayed conductive film.
4. The method according to claim 1 , wherein,
the cooling plate is only configured by a plate part having a shape of a plate.
5. The method according to claim 1 , wherein,
in steps (a), (b), (c), and (d),
the cooling plate is only provided with a plate part having a shape of a plate, and further comprising the step of
(e) after step (d), connecting a cooling fin to the plate part of the cooling plate.