Method for manufacturing silicon carbide semiconductor device
A method for manufacturing a silicon carbide semiconductor device includes the step of forming a mask pattern of a silicon oxide film by removing a portion of the silicon oxide film by means of etching employing a gas containing oxygen gas and at least one fluorine compound gas selected from a group consisting of CF 4 , C 2 F 6 , C 3 F 8 , and SF 6 .
1. A method for manufacturing a silicon carbide semiconductor device, comprising the steps of:
preparing a silicon carbide substrate;
forming a silicon oxide film on said silicon carbide substrate;
forming a first mask pattern of said silicon oxide film by removing a portion of said silicon oxide film by means of first etching employing a first gas containing CHF 3 ;
forming a first impurity region having first conductivity type by means of ion implantation of a first ion into said silicon carbide substrate including said silicon oxide film having said first mask pattern;
forming a second mask pattern of said silicon oxide film by removing a portion of said silicon oxide film by means of second etching employing a second gas containing oxygen gas and at least one fluorine compound gas selected from a group consisting of CF 4 , C 2 F 6 , C 3 F 8 , and SF 6 ; and
forming a second impurity region having second conductivity type different from said first conductivity type by means of ion implantation of a second ion into said silicon carbide substrate including said silicon oxide film having said second mask pattern.
2. The method for manufacturing the silicon carbide semiconductor device according to claim 1 , wherein a ratio of said oxygen gas in said second gas is 30 volume % or greater.
3. The method for manufacturing the silicon carbide semiconductor device according to claim 1 , wherein etching selectivity in said second etching is not less than 0.5 and not more than 2.
4. The method for manufacturing the silicon carbide semiconductor device according to claim 1 , wherein the step of forming said silicon oxide film includes the steps of: forming an etching stop layer on said silicon carbide substrate; and forming said silicon oxide film on said etching stop layer.
5. The method for manufacturing the silicon carbide semiconductor device according to claim 4 , wherein said etching stop layer contains at least one metal selected from a group consisting of nickel, aluminum, and titanium.
6. The method for manufacturing the silicon carbide semiconductor device according to claim 5 , wherein said etching stop layer is constituted by a stack in which a first layer made of titanium, a second layer made of nickel or aluminum, and a third layer made of titanium are stacked in this order from the silicon carbide substrate side.