Method for manufacturing silicon carbide semiconductor device
A method for manufacturing a silicon carbide semiconductor device includes the step of forming a silicon dioxide film. The step of forming an electrode includes the steps of forming a metal film containing Al and Ti on the silicon carbide substrate, and heating the metal film. The step of heating the metal film has the steps of increasing temperature of the metal film from a temperature of less than 300° C. to a temperature of not less than 300° C. and not more than 450° C. with a first temperature gradient, holding the metal film within a temperature range of not less than 300° C. and not more than 450° C. with a second temperature gradient, and increasing the temperature of the metal film to a temperature of not less than 500° C. with a third temperature gradient. The second temperature gradient is smaller than the first temperature gradient and the third temperature gradient.
1. A method for manufacturing a silicon carbide semiconductor device, comprising the steps of:
preparing a silicon carbide substrate;
forming a silicon dioxide film on said silicon carbide substrate; and
forming an electrode containing Al and Ti to make contact with said silicon carbide substrate and said silicon dioxide film,
the step of forming said electrode including the steps of
forming a metal film containing Al and Ti on said silicon carbide substrate, and
heating said metal film,
the step of heating said metal film having the steps of
increasing temperature of said metal film from a temperature of less than 300° C. to a temperature of not less than 300° C. and not more than 450° C. with a first temperature gradient,
holding said metal film within a temperature range of not less than 300° C. and not more than 450° C. with a second temperature gradient, after the step of increasing the temperature of said metal film, and
increasing the temperature of said metal film to a temperature of not less than 500° C. with a third temperature gradient, after the step of holding said metal film,
said second temperature gradient being smaller than said first temperature gradient and said third temperature gradient.
2. The method for manufacturing the silicon carbide semiconductor device according to claim 1 , wherein said metal film further contains Si.
3. The method for manufacturing the silicon carbide semiconductor device according to claim 1 , wherein, in the step of increasing the temperature of said metal film to a temperature of not less than 500° C., the temperature of said metal film is increased to a temperature of not less than 700° C.
4. The method for manufacturing the silicon carbide semiconductor device according to claim 1 , wherein the step of forming said metal film has the steps of:
forming a Ti layer to make contact with said silicon carbide substrate and said silicon dioxide film;
forming an Al layer on said Ti layer; and
forming a Si layer on said Al layer.
5. The method for manufacturing the silicon carbide semiconductor device according to claim 1 , wherein
the step of heating said metal film further has the step of removing Al by performing wet etching on said metal film, and
the step of removing said Al is performed after the step of holding said metal film within the temperature range of not less than 300° C. and not more than 450° C. and before the step of increasing the temperature of said metal film to a temperature of not less than 500° C.