Packaged integrated circuit devices with through-body conductive vias, and methods of making same

1. A semiconductor device, comprising:

a semiconductor die having an active surface and a back surface opposite the active surface;

a continuous encapsulant encapsulating the semiconductor die, the encapsulant having a front surface and a back surface opposite the front surface, wherein the active surface of the semiconductor die is generally flush with the front surface of the encapsulant, and wherein the back surface of the semiconductor die is embedded in the encapsulant;

a conductive line on the front surface of the encapsulant and the active surface of the semiconductor die; and

a conductive via extending through an entire thickness of the encapsulant from the front surface of the encapsulant to the back surface of the encapsulant, the conductive via being in direct contact with the conductive line.

2. The semiconductor device of claim 1 , wherein:

the conductive line is a first conductive line;

the semiconductor die further includes a first bond pad and a second bond pad at the active surface of the semiconductor die;

the first bond pad is in contact with the first conductive line;

the microelectronic device further includes a second conductive line in contact with the second bond pad;

the conductive via is a first conductive via;

the microelectronic device further includes a second conductive via extending from the front surface of the encapsulant to the back surface of the encapsulant, the second conductive via being in direct contact with the second conductive line;

the second conductive via is laterally spaced apart from both the semiconductor die and the first conductive via; and

the microelectronic device further includes a first solder ball attached to the first conductive line and a second solder ball attached to the second conductive line.

3. The semiconductor device of claim 1 , wherein:

the conductive line is a first conductive line;

the semiconductor die is a first semiconductor die having a first active surface and a first back surface;

the first semiconductor die includes a first bond pad at the first active surface of the first semiconductor die;

the first bond pad is in contact with the first conductive line;

the microelectronic device further includes a second semiconductor die having a second active surface and a second back surface opposite the second active surface, the second semiconductor die being laterally spaced apart from the first semiconductor die;

the second semiconductor die is encapsulated by the encapsulant with the second active surface generally flush with the front surface of the encapsulant;

the second back surface of the semiconductor die is embedded in the encapsulant;

the second semiconductor die includes a second bond pad at the second active surface of the second semiconductor die;

the microelectronic device further includes a second conductive line in contact with the second bond pad;

the conductive via is a first conductive via;

the microelectronic device further includes a second conductive via extending from the front surface of the encapsulant to the back surface of the encapsulant, the second conductive via being in direct contact with the second conductive line;

the second conductive via is laterally spaced apart from the first and second semiconductor dies and the first conductive via; and

the microelectronic device further includes a first solder ball attached to the first conductive line and a second solder ball attached to the second conductive line.

4. The semiconductor device of claim 1 , wherein the conductive via is laterally spaced apart from the semiconductor die.

5. The semiconductor device of claim 1 , wherein:

the conductive via is a first conductive via; and

the microelectronic device further includes a second conductive via extending from the front surface of the encapsulant to the back surface of the encapsulant, the second conductive via being laterally spaced apart from the semiconductor die and the first conductive via.

6. The semiconductor device of claim 1 , wherein:

the conductive line is a first conductive line;

the semiconductor die further includes a first bond pad and a second bond pad at the active surface of the semiconductor die;

the first bond pad is in contact with the first conductive line;

the microelectronic device further includes a second conductive line in contact with the second bond pad;

the conductive via is a first conductive via; and

the microelectronic device further includes a second conductive via extending from the front surface of the encapsulant to the back surface of the encapsulant, the second conductive via being in direct contact with the second conductive line.

7. The semiconductor device of claim 1 , further comprising a solder ball attached to the conductive line.

8. The semiconductor device of claim 1 , wherein:

the conductive line is a first conductive line;

the microelectronic device further includes a second conductive line in contact with the semiconductor die; and

the microelectronic device further includes a first solder ball attached to the first conductive line and a second solder ball attached to the second conductive line.

9. The semiconductor device of claim 1 , wherein:

the conductive line is a first conductive line;

the semiconductor die further includes a first bond pad and a second bond pad at the active surface of the semiconductor die;

the first bond pad is in contact with the first conductive line;

the microelectronic device further includes a second conductive line in contact with the second bond pad; and

the microelectronic device further includes a first solder ball attached to the first conductive line and a second solder ball attached to the second conductive line.

10. A semiconductor device, comprising:

a first semiconductor subassembly;

a second semiconductor subassembly proximate to the first semiconductor subassembly, the first and second semiconductor subassemblies each having a front side and a back side with the back side of the first semiconductor subassembly facing the front side of the second semiconductor subassembly;

wherein, the first and second subassemblies individually having:

an encapsulant;

a semiconductor die embedded in the encapsulant, the semiconductor die having an active surface generally flush with the front side of the first or second subassembly; and back surface embedded in the encapsulant;

a conductive line on the front side of the individual first and second subassemblies and on the active surface of the semiconductor die; and

a conductive via that extends from the front side to the back side of the first or second subassembly, the conductive via being in direct contact with the conductive line of the first or second subassembly; and

a conductive structure between and in contact with both the first and second semiconductor subassemblies, the conductive structure electrically coupling the conductive vias of the first and second subassemblies.

11. The semiconductor device of claim 10 , wherein the conductive structure is between and in direct contact with (1) the conductive line of the second subassembly and (2) the conductive via of the first subassembly.

12. The semiconductor device of claim 10 , wherein the conductive structure is between and in direct contact with (1) the conductive line of the second subassembly and (2) the conductive via of the first subassembly, and wherein the semiconductor device further includes a solder ball attached to the conductive line of the first subassembly.

13. The semiconductor device of claim 10 , wherein:

the conductive via of the first subassembly has a first end and a second end;

the first end is proximate the conductive line of the first subassembly; and

the second end is proximate the conductive structure.

14. The semiconductor device of claim 10 , wherein:

the conductive via of the first subassembly has a first end and a second end;

the first end is in direct contact with the conductive line of the first subassembly; and

the second end is in direct contact with the conductive structure.

15. The semiconductor device of claim 10 , wherein:

the conductive via of the first subassembly has a first end and a second end;

the first end is in direct contact with the conductive line of the first subassembly;

the second end is in direct contact with the conductive structure; and

the conductive line of the second subassembly is also in direct contact with the conductive structure.

16. The semiconductor device of claim 10 , wherein:

the conductive vias of the first and second subassemblies individually have a first end and a second end; and

the second end of the conductive via in the first subassembly is proximate the first end of the conductive via in the second subassembly.

17. The semiconductor device of claim 10 , wherein each of the first and second subassemblies comprises a plurality of integrated circuit dies.

18. A method of manufacturing a semiconductor device, comprising:

encapsulating a first semiconductor die with an encapsulant into a first semiconductor structure having a front side and a back side, the first semiconductor die having an active surface generally flush with the front side, and a back surface embedded in the encapsulant;

encapsulating a second semiconductor die with an encapsulant into a second semiconductor structure having a front side and a back side, the second semiconductor die having an active surface generally flush with the front side and a back surface embedded in the encapsulant, wherein the back surfaces of the first and second semiconductor structures face each other;

forming conductive lines on the front sides of the first and second semiconductor structures; and

forming a conductive via that extends from the front side of the first semiconductor structure to the front side of the second semiconductor structure, the conductive via being in direct contact with the conductive line.

19. A method of manufacturing a semiconductor device, comprising:

encapsulating a first semiconductor die with and encapsulant into a first semiconductor structure having a front side and a back side, the first semiconductor die having an active surface generally flush with the front side, and a back surface embedded in the encapsulant;

encapsulating a second semiconductor die with and encapsulant into a second semiconductor structure having a front side and a back side, the second semiconductor die having an active surface generally flush with the front side and a back surface embedded in the encapsulant, wherein the back surfaces of the first and second semiconductor structures face each other;

forming conductive lines on the front sides of the first and second semiconductor structures;

forming a conductive via that extends from the front side of the first semiconductor structure to the front side of the second semiconductor structure, the conductive via being in direct contact with the conductive line; and

singulating the encapsulated semiconductor dies.

20. The method of claim 19 , wherein encapsulating the first and the second semiconductor die each includes:

placing the semiconductor die on a sacrificial structure with the front side of the semiconductor die in contact with the sacrificial structure;

encapsulating the semiconductor die placed on the sacrificial structure;

removing the sacrificial structure; and

exposing the front side of the semiconductor die.

21. The method of claim 19 , wherein:

the method further includes placing the first semiconductor die and the second semiconductor die on a sacrificial structure;

encapsulating the semiconductor die includes encapsulating both the first and second semiconductor dies with the encapsulant while the first and second semiconductor dies are on the sacrificial structure; and

thereafter, removing the sacrificial structure from the first and second semiconductor dies.

22. The method of claim 19 , wherein:

the method further includes placing the first semiconductor die and the second semiconductor die on a sacrificial structure;

encapsulating the semiconductor die includes encapsulating both the first and second semiconductor dies with the encapsulant while the first and second semiconductor dies are on the sacrificial structure;

thereafter, removing the sacrificial structure from the first and second semiconductor dies;

forming the first semiconductor structure and the second semiconductor structure by singulating the encapsulated first and second semiconductor dies; and

placing a conductive structure between the first and second semiconductor structures, the conductive structure electrically coupling the conductive vias in the first and second semiconductor structures.