Use of contacts to create differential stresses on devices
Disclosed herein are various methods and structures using contacts to create differential stresses on devices in an integrated circuit (IC) chip. An IC chip is disclosed having a p-type field effect transistor (PFET) and an n-type field effect transistor (NFET). One embodiment of this invention includes creating this differential stress by varying the deposition conditions for forming PFET and NFET contacts, for example, the temperature at which the fill materials are deposited, and the rate at which the fill materials are deposited. In another embodiment, the differential stress is created by filling the contacts with differing materials that will impart differential stress due to differing coefficient of thermal expansions. In another embodiment, the differential stress is created by including a silicide layer within the NFET contacts and/or the PFET contacts.
1. A method of creating differential stress in a plurality of contacts in an integrated circuit (IC) chip, the method comprising:
providing a substrate including a p-type field effect transistor (PFET) and an n-type field effect transistor (NFET);
etching at least one PFET contact trench to the PFET;
depositing a first material at a first temperature in the at least one PFET contact trench to form a PFET metal contact within the PFET contact trench;
etching at least one NFET contact trench to the NFET; and
depositing a second material at a second temperature in the at least one NFET contact trench to form an NFET metal contact within the NFET contact trench,
wherein the first temperature of the first material forming the PFET metal contact is higher than the second temperature of the second material forming the NFET metal contact.
2. The method of claim 1 , wherein the first material has a first coefficient of thermal expansion (CTE) and the second material has a second CTE, and wherein the first CTE is higher than the than the second CTE.
3. The method of claim 1 , wherein a rate at which the first material is deposited is faster than a rate at which the second material is deposited.
4. The method of claim 1 , wherein the first material is tungsten.
5. The method of claim 1 , wherein the first temperature is in the range of approximately 400 C to approximately 600 C.
6. The method of claim 1 , wherein the second material is selected from the group consisting of: copper and tungsten.
7. The method of claim 1 , wherein the second temperature is in the range of approximately 200 C to approximately 400 C.
8. A method of creating differential stress in a plurality of contacts in an integrated circuit (IC) chip, the method comprising:
providing a substrate including a p-type field effect transistor (PFET) and an n-type field effect transistor (NFET);
etching at least one PFET contact trench to the PFET;
depositing a first material at a first temperature in the at least one PFET contact trench to form a PFET contact;
etching at least one NFET contact trench to the NFET; and
depositing a second material at a second temperature in the at least one NFET contact trench to form an NFET contact,
wherein the first temperature of the first material forming the PFET contact is higher than the second temperature of the second material forming the NFET contact, wherein the first material is compositionally distinct from the second material, and wherein a rate at which the first material is deposited is faster than a rate at which the second material is deposited.
9. The method of claim 8 , wherein the first material has a first coefficient of thermal expansion (CTE) and the second material has a second CTE, and wherein the first CTE is higher than the than the second CTE.
10. The method of claim 8 , wherein the first material is selected from the group consisting of: a polysilicon and tungsten.
11. The method of claim 8 , wherein the first temperature is in the range of approximately 400 C to approximately 600 C.
12. The method of claim 8 , wherein the second material is selected from the group consisting of: copper, titanium nitride and tungsten.
13. The method of claim 8 , wherein the second temperature is in the range of approximately 200 C to approximately 400 C.
14. A method of creating differential stress in a plurality of contacts in an integrated circuit (IC) chip, the method comprising:
providing a substrate including a p-type field effect transistor (PFET) and an n-type field effect transistor (NFET);
etching at least one PFET contact trench to the PFET;
depositing a first material at a first temperature only in the at least one PFET contact trench to form a PFET contact;
etching at least one NFET contact trench to the NFET; and
depositing a second material at a second temperature only in the at least one NFET contact trench to form an NFET contact,
wherein the first temperature of the first material forming the PFET contact is higher than the second temperature of the second material forming the NFET contact, and wherein a rate at which the first material is deposited is faster than a rate at which the second material is deposited.
15. The method of claim 14 , wherein the first material is selected from the group consisting of: a polysilicon and tungsten.
16. The method of claim 14 , wherein the first temperature is in the range of approximately 400 C to approximately 600 C.
17. The method of claim 14 , wherein the second material is selected from the group consisting of: copper, titanium nitride and tungsten.
18. The method of claim 14 , wherein the second temperature is in the range of approximately 200 C to approximately 400 C.