Semiconductor device and method of manufacturing the same
An electrode layer lies on a silicon carbide substrate in contact therewith and has Ni atoms and Si atoms. The number of Ni atoms is not less than 67% of the total number of Ni atoms and Si atoms. A side of the electrode layer at least in contact with the silicon carbide substrate contains a compound of Si and Ni. On a surface side of the electrode layer, C atom concentration is lower than Ni atom concentration. Thus, improvement in electrical conductivity of the electrode layer and suppression of precipitation of C atoms at the surface of the electrode layer can both be achieved.
1. A semiconductor device, comprising:
a silicon carbide substrate; and
an electrode layer lying on said silicon carbide substrate in contact therewith and having Ni atoms and Si atoms,
the number of said Ni atoms being not less than 67% of total number of said Ni atoms and said Si atoms at an interface of said electrode layer and said silicon carbide substrate,
at least a side of said electrode layer in contact with said silicon carbide substrate containing a compound of Si and Ni, and
on a surface side of said electrode layer, C atom concentration being lower than Ni atom concentration.
2. The semiconductor device according to claim 1 , wherein
on the surface side of said electrode layer, C atom concentration is lower than 3%.
3. The semiconductor device according to claim 1 , further comprising a metal pad layer in contact with the surface side of said electrode layer.
4. The semiconductor device according to claim 3 , wherein
said metal pad layer includes an Al layer.
5. The semiconductor device according to claim 3 , wherein
said metal pad layer includes an adhesive layer formed on said electrode layer and a main body layer formed on said adhesive layer, and said adhesive layer is composed of any of Ti, TiW, and TiN.
6. The semiconductor device according to claim 1 , wherein
Si atom concentration on the surface side of said electrode layer is lower than 30%.
7. A method of manufacturing a semiconductor device, comprising the steps of:
preparing a silicon carbide substrate;
forming a material layer lying on said silicon carbide substrate in contact therewith and having Ni atoms and Si atoms, the number of said Ni atoms being not less than 67% of total number of said Ni atoms and said Si atoms at an interface of said material layer and said silicon carbide substrate; and
forming an electrode layer by annealing said material layer with laser beams, at least a side of said electrode layer in contact with said silicon carbide substrate containing a compound of Si and Ni.
8. The method of manufacturing a semiconductor device according to claim 7 , further comprising the step of forming a metal pad layer on said electrode layer.
9. The method of manufacturing a semiconductor device according to claim 8 , wherein
said metal pad layer includes an Al layer.
10. The method of manufacturing a semiconductor device according to claim 8 , wherein
said step of forming a metal pad layer includes the steps of forming an adhesive layer on said electrode layer and forming a main body layer on said adhesive layer, and said adhesive layer is composed of any of Ti, TiW, and TiN.
11. The method of manufacturing a semiconductor device according to claim 7 , wherein
said step of forming a material layer includes the step of forming a mixed layer of Si and Ni.
12. The method of manufacturing a semiconductor device according to claim 7 , wherein
said step of forming a material layer includes the step of stacking an Si layer and an Ni layer.