IP Library Granted Patent US 8,853,853
Granted Patent B2
US 8,853,853 · App. 13/192,302 · Granted Oct 7, 2014

Bump structures

Inventors: Chih-Horng Chang (Taipei, TW); Tin-Hao Kuo (Hsinchu, TW); Chen-Shien Chen (Zhubei, TW); Yen-Liang Lin (Taichung, TW)
Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
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Quick Facts
Patent No.
US 8,853,853
App. No.
13/192,302
Granted
Oct 7, 2014
Kind
B2
Abstract

The embodiments of bump and bump-on-trace (BOT) structures provide bumps with recess regions for reflowed solder to fill. The recess regions are placed in areas of the bumps where reflow solder is most likely to protrude. The recess regions reduce the risk of bump to trace shorting. As a result, yield can be improved.

Claims (29)

1. An elongated bump structure, comprising:

a copper layer, and

a solder layer; wherein the elongated bump structure has a recess region for the solder layer to fill after the solder layer is reflowed.

2. The elongated bump structure of claim 1 , wherein the elongated bump structure further comprises an under-bump metallurgy (UBM) layer.

3. The elongated bump structure of claim 1 , wherein the elongated bump structure has two ends and a middle section connecting the two ends, wherein the recess region is in the middle section.

4. The elongated bump structure of claim 1 , wherein the elongated bump structure has a cross-sectional view with two hemispheres at two ends connected by a middle section, wherein the recess region is in the middle section.

5. The elongated bump structure of claim 3 , wherein ratio of a first width of the middle section to a second width of each of the two ends is in a range from about 0.02 to about 0.5.

6. The elongated bump structure of claim 1 , wherein the elongated bump structure has another recess region, ad wherein a cross-sectional area ratio of the recess regions to the elongated bump structure is in equal to or greater than about 0.01.

7. The elongated bump structure of claim 1 , wherein a cross-sectional area ratio of the recess region to the elongated bump structure is in equal to or less than about 0.1.

8. The elongated bump structure of claim 3 , wherein two adjacent walls of the recess region is at an angle equal to or greater than 90°.

9. The elongated bump structure of claim 1 , wherein a surface of the recess region is curved.

10. The elongated bump structure of claim 1 , wherein the copper layer is a copper post.

11. The elongated bump structure of claim 1 , further comprising:

a capping layer between the copper layer and the solder layer.

12. The elongated bump structure of claim 1 , wherein a ratio of a maximum length to a maximum width of the elongated bump structure is equal to or greater than about 1.2.

13. The elongated bump structure of claim 1 , wherein a minimum distance between an elongated bump and a neighboring metal trace equal to or greater than about 0.1 μm.

14. A bump-on-trace (BOT) structure, comprising:

a first work piece with a metal trace on a surface of the first work piece;

a second work piece with an elongated metal bump, wherein the elongated metal bump has a recess region; and

a solder bump, wherein the solder bump contacts both the metal trace of the first work piece and the elongated metal bump of the second work piece to form the BOT structure, wherein solder of the solder bump fills the recess region at least partially.

15. The BOT structure of claim 14 , wherein the elongated metal bump includes a copper post and an UBM layer.

16. The BOT structure of claim 14 , wherein the elongated metal bump has two ends and a middle section connecting the two ends, wherein the recess region is in the middle section.

17. The BOT structure of claim 14 , wherein a cross-sectional area ratio of the recess region to the elongated bump structure is in equal to or less than about 0.1.

18. The BOT structure of claim 14 , wherein two adjacent walls of the recess region is at an angle equal to or greater than 90°.

19. The BOT structure of claim 1 , wherein a surface of the recess region is curved.

20. A packaged substrate with a bump-on-trace (BOT) structure, comprising:

a first work piece with a metal trace on a surface of the first work piece;

a second work piece with an elongated metal bump, wherein the elongated metal bump has a recess region, wherein the elongated metal bump includes a copper post; and

a solder bump, wherein the solder bump contacts both the metal trace of the first work piece and the elongated metal bump of the second work piece to form the BOT structure, wherein solder of the solder bump fills at least partially the recess region of the recess region.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 30, 2011
From: CHANG, CHIH-HORNG; KUO, TIN-HAO; CHEN, CHEN-SHIEN; LIN, YEN-LIANG
To: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
Reel/Frame 026998/0164 →
Continuity (1)
Related Publication 20130026619A1 · Jan 31, 2013