Method, apparatus for holding and treatment of a substrate
Some embodiments discussed relates to an apparatus for holding a substrate, comprising a body with a surface for a semiconductor wafer to rest on, with the surface having a first surface area on which a first area of the semiconductor wafer can rest, and a second surface area on which a second area of the semiconductor wafer can rest, wherein the second surface area protrudes with respect to the first surface area.
1. An apparatus for holding a substrate, comprising:
a body comprising a conductive material with a surface for a semiconductor wafer to rest on, with the surface having
a first surface area on which a first area of the semiconductor wafer is to rest;
a second surface area on which a second area of the semiconductor wafer is to rest when the first area of the semiconductor wafer is resting on the first surface area, wherein
the second surface area protrudes with respect to the first surface area; and
the body includes a dielectric layer;
wherein the first surface area of the surface defines a first plane and the second surface area of the surface defines a second plane; and
wherein the distance between the first plane and the second plane is greater than about 100 microns.
2. The apparatus of claim 1 , wherein the conductive material is selected from the group consisting of aluminum, copper, and brass.
3. The apparatus of claim 2 , wherein the first area of the semiconductor wafer encloses the second area of the semiconductor wafer.
4. The apparatus of claim 2 , wherein the surface is configured to be connected in an interlocking manner with the first and second areas of the semiconductor wafer.
5. The apparatus of claim 2 , wherein the first area of the semiconductor wafer encloses the second area of the semiconductor wafer.
6. The apparatus of claim 2 , wherein the surface is configured to be connected in an interlocking manner with the first and second areas of the semiconductor wafer.
7. The apparatus of claim 1 , wherein:
the body has a central axis;
the first surface area and the second surface area are concentric; and
a radius of the first surface area is greater than about 50% of a radius (R) of the semiconductor wafer.
8. The apparatus of claim 1 , wherein the first surface area comprises gold.
9. The apparatus of claim 1 , wherein the first surface area and the second surface area of the surface are rigidly coupled to each other.
10. The apparatus of claim 1 , wherein the first surface area and the second surface area are formed integral with the body.
11. The apparatus of claim 1 , wherein the conductive material comprises aluminum.
12. The apparatus of claim 1 , wherein at least one of the first surface area and the second surface area includes at least one opening.
13. The apparatus of claim 1 , wherein the distance between the first plane and the second plane is less than about 1000 microns.
14. The apparatus of claim 1 , wherein the dielectric layer is disposed on top of at least one of the first and the second surface area.
15. The apparatus of claim 14 , wherein the dielectric layer is selected from the group consisting of oxide, ceramic, and polymer.
16. The apparatus of claim 1 , wherein at least one of the first and the second surface area includes a conductive layer.
17. The apparatus of claim 1 , wherein the distance between the first plane and the second plane is greater than about 100 microns.
18. The apparatus of claim 1 , wherein the conductive material is selected from the group consisting of aluminum, copper, and brass.
19. The apparatus of claim 1 , wherein at least one of the first surface area and the second surface area includes at least one opening.
20. The apparatus of claim 1 , wherein the dielectric layer is disposed on top of at least one of the first and the second surface area.
21. A substrate holder, comprising:
a first body portion comprising a conductive material and having a planar surface to support a first portion of a semiconductor wafer; and
a second body portion comprising a conductive material and having a planar surface that is in an offset plane from and substantially parallel to the planar surface of the first body portion, the planar surface of the second body portion adapted to support a second portion of the semiconductor wafer that is in a different plane than the first portion of the semiconductor wafer when the first portion of the semiconductor wafer is being supported by the planar surface of the first body portion wherein
the first and second body portions have openings extending to the planar surface of the second body portion; and
the first body portion has openings extending to the planar surface of the first body portion.
22. An apparatus for holding a substrate, comprising:
a body comprising a conductive material with a surface for a semiconductor wafer to rest on, with the surface having
a first surface area on which a first area of the semiconductor wafer is to rest;
a second surface area on which a second area of the semiconductor wafer is to rest when the first area of the semiconductor wafer is resting on the first surface area, wherein
the second surface area protrudes with respect to the first surface area; and
the body includes a dielectric layer;
wherein the first surface area of the surface defines a first plane and the second surface area of the surface defines a second plane; and
wherein the distance between the first plane and the second plane is less than about 1000 microns.