Sulfonium compound, photo-acid generator, and method for manufacturing the same
A sulfonium compound represented by formula (1), a photo-acid generator, and a method for producing a sulfonium compound are provided: wherein X represents an electron-donating group; R 1 and R 2 each represent an alkyl group, a cycloalkyl group, or the like; R 3 and R 4 each represent an arylene group or a heteroarylene group; R 5 and R 6 each represent an alkyl group, a cycloalkyl group, or the like; and A − and B − are anions that are different from each other. The sulfonium compound, when used as a photo-acid generator, can produce a uniform and excellent resist pattern.
1. A photo-acid generator compound represented by the following formulas:
wherein in the photoacid generator compounds of formulas (4-1) to (4-6),
X 31 represents any one selected from the group consisting of —O—, —OCH 2 —, —OCH 2 O—, —OCH 2 CH 2 O—, —O(C 6 H 4 )O—, —CH 2 SCH 2 — and —S(C 6 H 4 )S—;
X 32 and X 34 each independently represent any one selected from the group consisting of —O—;
X 33 represents any one selected from the group consisting of —O—, —OCH 2 —, —OCH 2 O—, —OCH 2 CH 2 O— and —CH 2 SCH 2 —;
R 41 , R 42 , R 43 and R 44 each independently represent any one selected from the group consisting of a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, and a halogenated alkyl group having 1 to 5 carbon atoms;
n 1 , n 2 , n 3 and n 4 each independently represent an integer from 1 to 5; and
A − and B − represent anions that are different from each other, and wherein the anions A − and B − each independently represent any one selected from the group consisting of OSO 2 CF 3 − , OSO 2 C 4 F 9 − , OSO 2 C 8 F 17 − , N(CF 3 ) 2 − , N(C 2 F 5 ) 2 − , N(C 4 F 9 ) 2 − , C(CF 3 ) 3 − , C(C 2 F 5 ) 3 − , C(C 4 F 9 ) 3 − and a compound represented by the following formula (1-4):
wherein in the formula (1-4),
Y 10 represents any one selected from the group consisting of a cycloalkyl group, a heterocycloalkyl group, an aryl group, a heteroaryl group, an alkyl group, a heteroalkyl group, an allyl group, a perfluoroalkyl group, a haloalkyl group and an alkylsulfonyl group;
R 11 represents any one selected from the group consisting of an alkanediyl group, an alkenediyl group, NR′, S, O, CO and combinations thereof, while R′ represents any one selected from the group consisting of a hydrogen atom and an alkyl group;
R 12 and R 13 each independently represent any one selected from the group consisting of a hydrogen atom and an alkyl group having 1 to 8 carbon atoms;
r represents an integer from 0 to 5; and
Q 5 and Q 6 each independently represent a halogen atom.
2. The photo-acid generator according to claim 1 , wherein the anion A− represents any one selected from the group consisting of OSO 2 CF 3 − , OSO 2 CF 2 CF 2 CF 2 CF 3 − and an anionic moiety represented by the following formula (1-5), and
the anion B− represents any one selected from the group consisting of OSO 2 CF 3 − , OSO 2 CF 2 CF 2 CF 2 CF 3 − and an anionic moiety represented by the following formula (1-5):