Cleaning solution and damascene process using the same
A cleaning solution is provided. The cleaning solution includes an aliphatic polycarboxylic acid, a chain sulfonic acid substantially less than 4 wt % and an amine containing buffer agent.
1. A cleaning solution, comprising:
(a) an aliphatic polycarboxylic acid;
(b) a chain sulfonic acid substantially less than 4 wt %; and
(c) an amine containing buffer agent;
wherein the amine containing buffer agent comprising Triethanolamine (TEA), Monoethanolamine (MEA), Diethanolamine (DEA), Methyl Diethanolamine (MDEA) or monoisopropanolamine (MIPA).
2. The cleaning solution of claim 1 , wherein the aliphatic polycarboxylic acid comprises an alkyl polycarboxylic acid selected from a group consisting of tartaric acid, maleic acid, malic acid, fumaric acid, succinic acid, oxalic acid, malonic acid, maleic anhydride, citric acid, adipic acid, azelaic acid, sebacic acid, 1,13-tridecanedioic acid and the arbitrary combinations thereof.
3. The cleaning solution of claim 1 , wherein the aliphatic polycarboxylic acid is an aromatic polycarboxylic acid comprising phthalic acid or isophthalic acid.
4. The cleaning solution of claim 1 , wherein the chain sulfonic acid is selected from a group consisting of mesylic acid, esylic acid, tosylic acid, taurine and the arbitrary combinations thereof.
5. The cleaning solution of claim 1 , further comprising an oxidizing agent selected from a group consisting of H 2 O 2 , Fe(NO 3 ) 3 , KlO 3 , KMnO4, HNO 3 , NH4ClO 2 , NH 4 ClO 3 , NH 4 IO 3 , NH 4 BO 3 , NH 4 ClO 4 , NH 4 IO 3 , (NH 4 ) 2 S 2 O 8 , (N(CH 3 ) 4 )ClO 2 , (N(CH 3 ) 4 )ClO 3 , (N(CH 3 ) 4 )IO 3 , (N(CH 3 ) 4 )BO 3 , (N(CH 3 ) 4 )ClO 4 , (N(CH 3 ) 4 )IO 4 , (N(CH 3 ) 4 )S 2 O 8 , (CO(NH 2 ) 2 )H 2 O 2 , CH 3 (CO)OOH and the arbitrary combinations thereof.
6. The cleaning solution of claim 1 , further comprising a co-solvent selected from a group consisting of ethylene glycol, propylene glycol (PG), neopentyl glycol, 1,3-propanediol, diethyleneglycol, dipropyleneglycol, glycerol, formamide, acetamide, N-methylpyrrolidone (NMP), N,N-dimethylformamide, N,N-dimethylacetamide, sulfolane, dimethylsulfoxide (DMSO), y-butyrolactone, propylene carbonate, diethylene glycol monomethyl ether, triethylene glycol monomethyl ether, diethylene glycol monoethyl ether, triethylene glycol monoethyl ether, ethylene glycol monopropyl ether, ethylene glycol monobutyl ether, diethylene glycol monobutyl ether, butyl carbitol, triethylene glycol monobutyl ether, ethylene glycol monohexyl ether, diethylene glycol monohexyl ether, ethylene glycol phenyl ether, propylene glycol methyl ether, dipropylene glycol methyl ether, tripropylene glycol methyl ether, propylene glycol n-propyl ether, dipropylene glycol n-propyl ether (DPGPE), tripropylene glycol n-propyl ether, propylene glycol n-butyl ether, dipropylene glycol n-butyl ether, tripropylene glycol n-butyl ether, propylene glycol phenyl ether and the arbitrary combinations thereof.
7. The cleaning solution of claim 1 , further comprising a chelating agent selected from a group consisting of oxalic acid, 1,2,4-triazole (TAZ), benzotriazole (BTA), tolyltriazole, 5-phenyl-benzotriazole, 5-nitro-benzotriazole, 3-amino-5-mercapto-1,2,4-triazole, 1-amino-1,2,4-triazole, hydroxybenzotriazole, 2-(5-amino-pentyl)-benzotriazole, 1-amino-1,2,3-triazole, 1-amino-5-methyl-1,2,3-triazole, 3-amino-1,2,4-triazole, 3-mercapto-1,2,4-triazole, 3-isopropyl-1,2,4-triazole, 5-phenylthiol-benzotriazole, halo-benzotriazoles, naphthotriazole, thyl-2-imidazolidinone, 1,5-pentamethylenetetrazole, 1-phenyl-5-mercaptotetrazole, diaminomethyltriazine, mercaptobenzothiazole, imidazoline thione, mercaptobenzimidazole, 4-methyl-4H-1,2,4-triazole-3-thiol, 5-amino-1,3,4-thiadiazole-2-thiol, ben-50 zothiazole, tritolyl phosphate, indiazole, ethylenediaminetetraacetic acid (EDTA), 1,2-cyclohexanediamine-N,N,N′,N′ tetraacetic acid (CDTA), 2-mercaptobenzoimidizole (MBI), 2-mercaptobenzothiazole, 4-methyl-2-phenylimidazole, 2-mercaptothiazoline, 5-aminotetrazole (ATA), 5-amino-1,3,4-thiadiazole-2-thiol, 2,4-diamino-6-methyl-1,3,5-triazine, thiazole, triazine, methyltetrazole, 1,3-dime and the arbitrary combinations thereof.
8. The cleaning solution of claim 1 , further comprising a weak acid selected from a group consisting of acetic acid, lactic acid, glyconic acid, gluconic acid, ascorbic acid, benzoic acid and the arbitrary combinations thereof.
9. The cleaning solution of claim 1 , further comprising HF or NH 4 F.
10. The cleaning solution of claim 1 , wherein the cleaning solution has a pH substantially less than or equal to 7.
11. A cleaning method, comprising steps of applying the cleaning solution in accordance with claim 1 onto a surface of a semiconductor substrate by a liner cleaning tool or a spin/spray tool.
12. A damascene process, comprising:
providing a substrate having a conductive layer thereon;
sequentially forming a dielectric layer and a hard mask layer on the substrate;
sequentially etching the hard mask layer and the dielectric layer, so as to form an opening exposing the conductive layer; and
performing a post-etch cleaning process with a cleaning solution, wherein the cleaning solution comprises:
(a) an aliphatic polycarboxylic acid;
(b) a chain sulfonic acid substantially less than 4 wt %; and
(c) an amine containing buffer agent;
wherein the amine containing buffer agent comprising Triethanolamine (TEA), Monoethanolamine (MEA), Diethanolamine (DEA), Methyl Diethanolamine (MDEA) or monoisopropanolamine (MIPA).
13. The damascene process of claim 12 , wherein the aliphatic polycarboxylic acid comprises an alkyl polycarboxylic acid selected from a group consisting of tartaric acid, maleic acid, malic acid, fumaric acid, succinic acid, oxalic acid, malonic acid, maleic anhydride, citric acid, adipic acid, azelaic acid, sebacic acid, 1,13-tridecanedioic acid and the arbitrary combinations thereof.
14. The damascene process of claim 12 , wherein the aliphatic polycarboxylic acid is an aromatic polycarboxylic acid comprising phthalic acid or isophthalic acid.
15. The damascene process of claim 12 , wherein the chain sulfonic acid is selected from a group consisting of mesylic acid, esylic acid, tosylic acid, taurine and the arbitrary combinations thereof.
16. The damascene process of claim 12 , wherein the cleaning solution further comprises an oxidizing agent selected from a group consisting of H 2 O 2 , Fe(NO 3 ) 3 , KIO 3 , KMnO4, HNO 3 , NH4ClO 2 , NH 4 ClO 3 , NH 4 IO 3 , NH 4 BO 3 , NH 4 ClO 4 , NH 4 IO 3 , (NH 4 ) 2 S 2 O 8 , (N(CH 3 ) 4 )ClO 2 , (N(CH 3 ) 4 )ClO 3 , (N(CH 3 ) 4 )IO 3 , (N(CH 3 ) 4 )BO 3 , (N(CH 3 ) 4 )ClO 4 , (N(CH 3 ) 4 )IO 4 , (N(CH 3 ) 4 )S 2 O 8 , (CO(NH 2 ) 2 )H 2 O 2 , CH 3 (CO)OOH and the arbitrary combinations thereof.
17. The damascene process of claim 12 , wherein the cleaning solution further comprises a co-solvent selected from a group consisting of ethylene glycol, propylene glycol (PG), neopentyl glycol, 1,3-propanediol, diethyleneglycol, dipropyleneglycol, glycerol, formamide, acetamide, N-methylpyrrolidone (NMP), N,N-dimethylformamide, N,N-dimethylacetamide, sulfolane, dimethylsulfoxide (DMSO), y-butyrolactone, propylene carbonate, diethylene glycol monomethyl ether, triethylene glycol monomethyl ether, diethylene glycol monoethyl ether, triethylene glycol monoethyl ether, ethylene glycol monopropyl ether, ethylene glycol monobutyl ether, diethylene glycol monobutyl ether, butyl carbitol, triethylene glycol monobutyl ether, ethylene glycol monohexyl ether, diethylene glycol monohexyl ether, ethylene glycol phenyl ether, propylene glycol methyl ether, dipropylene glycol methyl ether, tripropylene glycol methyl ether, propylene glycol n-propyl ether, dipropylene glycol n-propyl ether (DPGPE), tripropylene glycol n-propyl ether, propylene glycol n-butyl ether, dipropylene glycol n-butyl ether, tripropylene glycol n-butyl ether, propylene glycol phenyl ether and the arbitrary combinations thereof.
18. The damascene process of claim 12 , wherein the cleaning solution further comprises a chelating agent selected from a group consisting of oxalic acid, 1,2,4-triazole (TAZ), benzotriazole (BTA), tolyltriazole, 5-phenyl-benzotriazole, 5-nitro-benzotriazole, 3-amino-5-mercapto-1,2,4-triazole, 1-amino-1,2,4-triazole, hydroxybenzotriazole, 2-(5-amino-pentyl)-benzotriazole, 1-amino-1,2,3-triazole, 1-amino-5-methyl-1,2,3-triazole, 3-amino-1,2,4-triazole, 3-mercapto-1,2,4-triazole, 3-isopropyl-1,2,4-triazole, 5-phenylthiol-benzotriazole, halo-benzotriazoles, naphthotriazole, thyl-2-imidazolidinone, 1,5-pentamethylenetetrazole, 1-phenyl-5-mercaptotetrazole, diaminomethyltriazine, mercaptobenzothiazole, imidazoline thione, mercaptobenzimidazole, 4-methyl-4H-1,2,4-triazole-3-thiol, 5-amino-1,3,4-thiadiazole-2-thiol, ben-50 zothiazole, tritolyl phosphate, indiazole, ethylenediaminetetraacetic acid (EDTA), 1,2-cyclohexanediamine-N,N,N′,N′ tetraacetic acid (CDTA), 2-mercaptobenzoimidizole (MBI), 2-mercaptobenzothiazole, 4-methyl-2-phenylimidazole, 2-mercaptothiazoline, 5-aminotetrazole (ATA), 5-amino-1,3,4-thiadiazole-2-thiol, 2,4-diamino-6-methyl-1,3,5-triazine, thiazole, triazine, methyltetrazole, 1,3-dime and the arbitrary combinations thereof.
19. The damascene process of claim 12 , wherein the cleaning solution further comprises a weak acid selected from a group consisting of acetic acid, lactic acid, glyconic acid, gluconic acid, ascorbic acid, benzoic acid and the arbitrary combinations thereof.
20. The damascene process of claim 12 , wherein the cleaning solution further comprises HF or NH 4 F.
21. The damascene process of claim 12 , wherein the cleaning solution has a pH substantially less than or equal to 7; and the post-etch cleaning process is performed at a temperature ranging from 30° C. to 50° C.