Semiconductor chip and stacked semiconductor package having the same
A semiconductor chip includes a semiconductor substrate having one surface, an other surface which faces away from the one surface, and through holes which pass through the one surface and the other surface; through electrodes filled in the through holes; and a gettering layer formed of polysilicon interposed between the through electrodes and inner surfaces of the semiconductor substrate whose form is defined by the through holes.
1. A semiconductor chip comprising:
a semiconductor substrate having one surface, an other surface which faces away from the one surface, and through holes which pass through the one surface and the other surface;
through electrodes filled in the through holes;
a gettering layer formed of polysilicon interposed between the through electrodes and inner surfaces of the semiconductor substrate whose form is defined by the through holes; and
a dielectric layer formed between the gettering layer and the through electrodes.
2. The semiconductor chip according to claim 1 , wherein the gettering layer is formed between entire inner surfaces of the semiconductor substrate whose form is defined by the through holes, and the through electrodes.
3. The semiconductor chip according to claim 1 , further comprising:
an adhesive layer formed between the dielectric layer and the through electrodes.
4. The semiconductor chip according to claim 1 ,
wherein the semiconductor substrate further includes an integrated circuit which is formed from the one surface of the semiconductor substrate to a partial thickness of the semiconductor substrate, and
wherein the gettering layer is formed between portions of the inner surfaces of the semiconductor substrate whose form is defined by the through holes where the integrated circuit is disposed, and the through electrodes.
5. The semiconductor chip according to claim 4 ,
the dielectric layer is extended between the semiconductor substrate and the through electrodes for insulating the semiconductor substrate and the through electrodes.
6. The semiconductor chip according to claim 1 , further comprising:
a circuit pattern formed over the one surface of the semiconductor substrate, and including wiring layers and a dielectric layer which isolates the semiconductor substrate and the wiring layers from each other and isolates the wiring layers from one another,
wherein the through electrodes pass through the circuit pattern.
7. The semiconductor chip according to claim 6 , wherein the gettering layer extends to between the circuit pattern and the through electrodes such that the gettering layer is interposed between the circuit pattern and the through electrodes.
8. The semiconductor chip according to claim 1 , further comprising:
a circuit pattern formed over the one surface of the semiconductor substrate and the through electrodes,
wherein the circuit pattern comprises:
bonding pads formed over a second surface of the circuit pattern facing away from a first surface of the circuit pattern which faces the semiconductor substrate;
wiring layers electrically connecting the through electrodes and the bonding pads with each other; and
a dielectric layer isolating the semiconductor substrate and the through electrodes from the wiring layers, the wiring layers from one another, and the wiring layers and the bonding pads from each other.
9. A semiconductor package comprising:
a plurality of semiconductor chips each including a semiconductor substrate having one surface, an other surface which faces away from the one surface, and through holes which pass through the one surface and the other surface, through electrodes filled in the through holes, and a gettering layer formed of polysilicon interposed between the through electrodes and inner surfaces of the semiconductor substrate whose form is by the through holes, the plurality of semiconductor chips being stacked such that their through electrodes are electrically connected with one another; and
conductive connection members electrically connecting the through electrodes of the stacked semiconductor chips.
10. The semiconductor package according to claim 9 , wherein the gettering layer is formed between entire inner surfaces of the semiconductor substrate whose form is defined by the through holes, and the through electrodes.
11. The semiconductor package according to claim 10 , wherein each semiconductor chip further includes:
a dielectric layer formed between the gettering layer and the through electrodes; and
an adhesive layer formed between the dielectric layer and the through electrodes.
12. The semiconductor package according to claim 9 ,
wherein the semiconductor substrate of each semiconductor chip further includes an integrated circuit which is formed from the one surface of the semiconductor substrate to a partial thickness of the semiconductor substrate, and
wherein the gettering layer is formed between portions of the inner surfaces of the semiconductor substrate whose form is defined by the through holes where the integrated circuit is disposed, and the through electrodes.
13. The semiconductor package according to claim 12 , wherein each semiconductor chip further includes:
a dielectric layer formed between the gettering layer and the through electrodes and between the semiconductor substrate and the through electrodes; and
an adhesive layer formed between the dielectric layer and the through electrodes.
14. The semiconductor package according to claim 9 ,
wherein each semiconductor chip further includes:
a circuit pattern formed over the one surface of the semiconductor substrate, and including wiring layers and a dielectric layer which isolates the semiconductor substrate and the wiring layers from each other and the wiring layers from one another, and
wherein the through electrodes pass through the circuit pattern.
15. The semiconductor package according to claim 14 , wherein the gettering layer of each semiconductor chip extends to between the circuit pattern and the through electrodes such that the gettering layer is interposed between the circuit pattern and the through electrodes.
16. The semiconductor package according to claim 9 ,
wherein each semiconductor chip further includes:
a circuit pattern formed over the one surface of the semiconductor substrate and the through electrodes, and
wherein the circuit pattern comprises:
bonding pads formed over a second surface of the circuit pattern facing away from a first surface of the circuit pattern which faces the semiconductor substrate;
wiring layers electrically connecting the through electrodes and the bonding pads with each other; and
a dielectric layer isolating the semiconductor substrate and the through electrodes from the wiring layers, the wiring layers from one another, and the wiring layers and the bonding pads from each other.
17. The semiconductor package according to claim 9 , further comprising:
a first dielectric layer formed under a lower surface of a lowermost semiconductor chip among the stacked semiconductor chips in such a way as to leave exposed the through electrodes of the lowermost semiconductor chip;
redistribution lines formed under the first dielectric layer and electrically connected with the through electrodes exposed through the first dielectric layer; and
a second dielectric layer formed under the first dielectric layer including the redistribution lines in such a way as to leave exposed portions of the redistribution lines.
18. The semiconductor package according to claim 9 , further comprising:
a structural body supporting the semiconductor chips and having connection electrodes which are electrically connected with the through electrodes of the lowermost semiconductor chip among the stacked semiconductor chips.
19. The semiconductor package according to claim 18 , wherein the structural body comprises any one of a printed circuit board, an interposer and a semiconductor package.