Semiconductor device, flip-chip mounting method and flip-chip mounting apparatus
A semiconductor chip ( 1 ) is flip-chip mounted on a circuit board ( 4 ) with an underfill resin ( 6 ) interposed between the semiconductor chip ( 1 ) and the circuit board ( 4 ) and a container covering the semiconductor chip ( 1 ) is bonded on the circuit board ( 4 ). At this point, the semiconductor chip ( 1 ) positioned with the underfill resin ( 6 ) interposed between the circuit board ( 4 ) and the semiconductor chip ( 1 ) is pressed and heated by a pressure-bonding tool ( 8 ); meanwhile, the surface of the underfill resin ( 6 ) protruding around the semiconductor chip ( 1 ) is pressed by the pressure-bonding tool ( 8 ) through a film ( 13 ) on which a surface unevenness is formed in a periodically repeating pattern, so that a surface unevenness ( 16 a ) is formed. The inner surface of the container covering the semiconductor chip ( 1 ) is bonded to the surface unevenness ( 16 a ) on the surface of the underfill resin.
1. A flip-chip mounting method comprising:
forming a surface unevenness in a periodically repeating pattern on a surface of an insulating resin protruding around a semiconductor chip, while a pressure-bonding tool presses and heats the semiconductor chip positioned with the insulating resin interposed between a circuit board and the semiconductor chip; and
bonding an inner surface of a container covering the semiconductor chip to the surface unevenness on the surface of the insulating resin,
wherein the surface unevenness is formed by pressing the pressure-bonding tool to and around the semiconductor chip through a film and transferring a periodically repeating unevenness pattern on a surface of the film to the surface of the insulating resin protruding around the semiconductor chip.
2. A flip-chip mounting method, wherein a semiconductor chip is flip-chip mounted on a circuit board with an underfill resin interposed between the semiconductor chip and the circuit board and a container covering the semiconductor chip is bonded on the circuit board, the flip-chip mounting method comprising:
forming an unevenness layer by pressing and heating, by a pressure-bonding tool, the semiconductor chip positioned with the underfill resin interposed between the circuit board and the semiconductor chip, and applying a film sheet to a surface of the underfill resin protruding around the semiconductor chip, the film sheet having a surface unevenness in a periodically repeating pattern on a surface of the film sheet; and
bonding an inner surface of the container covering the semiconductor chip to the unevenness layer on the surface of the underfill resin.