Polishing apparatus having thermal energy measuring means
A polishing apparatus is used for polishing a substrate such as a semiconductor wafer to a flat mirror finish. The polishing apparatus includes a polishing table having a polishing surface, a substrate holding apparatus configured to hold the substrate and to press the substrate against the polishing surface, and a controller. The substrate holding apparatus includes an elastic membrane configured to form a substrate holding surface which is brought into contact with the substrate, a carrier provided above the elastic membrane, at least one pressure chamber formed between the elastic membrane and the carrier, and an infrared light detector configured to measure thermal energy from the elastic membrane. The controller calculates an estimate value of a temperature of the elastic membrane using a measured value of the infrared light detector.
1. A polishing apparatus for polishing a substrate, comprising:
a polishing table having a polishing surface;
a substrate holding apparatus configured to hold the substrate and to press the substrate against said polishing surface; and
a controller;
said substrate holding apparatus comprising:
an elastic membrane configured to form a substrate holding surface which is brought into contact with the substrate;
a carrier provided above said elastic membrane;
at least one pressure chamber formed between said elastic membrane and said carrier; and
an infrared light detector configured to measure thermal energy from said elastic membrane;
wherein said controller calculates an estimate value of a temperature of said elastic membrane using a measured value of said infrared light detector.
2. A polishing apparatus according to claim 1 , wherein said controller calculates an estimate value of a temperature of the substrate using the estimate value of the temperature of said elastic membrane.
3. A polishing apparatus according to claim 1 , wherein a polishing condition is changed using the estimate value of the temperature of said elastic membrane.
4. A polishing apparatus according to claim 1 , wherein said infrared light detector comprises an infrared radiation thermometer.
5. A substrate holding apparatus for holding a substrate and pressing the substrate against a polishing surface, comprising:
an elastic membrane configured to form a substrate holding surface which is brought into contact with the substrate;
a carrier provided above said elastic membrane;
at least one pressure chamber formed between said elastic membrane and said carrier; and
an infrared light detector configured to measure thermal energy from said elastic membrane;
wherein surface roughing processing is applied to a rear surface side of said substrate holding surface of said elastic membrane.
6. A substrate holding apparatus according to claim 5 , wherein at least two pressure chambers are formed between said elastic membrane and said carrier, and said infrared light detector is provided in at least one pressure chamber of said at least two pressure chambers.
7. A substrate holding apparatus according to claim 5 , wherein said substrate holding surface of said elastic membrane for forming said pressure chamber in which said infrared light detector is provided has no opening.
8. A substrate holding apparatus according to claim 5 , wherein said infrared light detector comprises an infrared radiation thermometer.
9. A polishing apparatus comprising:
a polishing table having a polishing surface; and
a substrate holding apparatus for holding a substrate and pressing the substrate against a polishing surface, comprising:
an elastic membrane configured to form a substrate holding surface which is brought into contact with the substrate;
a carrier provided above said elastic membrane;
at least one pressure chamber formed between said elastic membrane and said carrier; and
an infrared light detector configured to measure thermal energy from said elastic membrane;
wherein surface roughing processing is applied to a rear surface side of said substrate holding surface of said elastic membrane.