Method for manufacturing semiconductor device
View Patent ↗An object is to provide a manufacturing method of a semiconductor device in which a defect in characteristics due to a crack occurring in a semiconductor device is reduced. Provision of a crack suppression layer formed of a metal film in the periphery of a semiconductor element makes it possible to suppress a crack occurring from the outer periphery of a substrate and reduce damage to the semiconductor element. In addition, even if the semiconductor device is subjected to physical forces from the outer periphery in separation and transposition steps, progression (growth) of a crack to the semiconductor device can be suppressed by the crack suppression layer.
1. A method for manufacturing a semiconductor device comprising the steps of:
forming an insulating layer over a first substrate;
forming a pixel circuit portion and a driver circuit portion over the insulating layer, each comprising a transistor including a gate electrode, a source electrode and a drain electrode; and
forming a layer formed of a metal having a loop shape along a periphery of the first substrate over the insulating layer,
wherein the layer is formed in the same step as at least one of the gate electrode, the source electrode, and the drain electrode, and
wherein the layer surrounds the pixel circuit portion and the driver circuit portion.
2. The method for manufacturing a semiconductor device according to claim 1 , wherein the layer comprises a material selected from the group consisting of aluminum, chromium, tantalum, titanium, molybdenum, tungsten, silver, copper, gold, platinum, nickel, and palladium.
3. The method for manufacturing a semiconductor device according to claim 1 , wherein the layer has a thickness of greater than or equal to 300 nm and less than or equal to 5000 nm.
4. The method for manufacturing a semiconductor device according to claim 1 , wherein the layer has a width of greater than or equal to 100 μm and less than or equal to 10000 μm.
5. The method for manufacturing a semiconductor device according to claim 1 , wherein the layer is electrically connected to the transistor.
6. The method for manufacturing a semiconductor device according to claim 1 , the transistor further comprising;
a gate insulating layer over the gate electrode; and
a semiconductor layer over the gate insulating layer,
wherein the source electrode and the drain electrode are provided over the semiconductor layer.
7. The method for manufacturing a semiconductor device according to claim 1 , further comprising the steps of:
forming a separation layer over the first substrate;
forming an adhesive layer which is removable by light or heat on a second substrate;
attaching the first substrate and the second substrate to each other through the adhesive layer after forming the layer;
separating the first substrate from the pixel circuit portion and the driver circuit portion attached to the second substrate;
forming a resin layer over a third substrate; and
attaching the second substrate and the third substrate to each other with the pixel circuit portion, the driver circuit portion, and the resin layer therebetween.