IP Library Granted Patent US 8,955,161
Granted Patent B2
US 8,955,161 · App. 14/217,099 · Granted Feb 10, 2015

Peakforce photothermal-based detection of IR nanoabsorption

Inventor: Gregory O. Andreev (Goleta, CA)
Assignee: Bruker Nano, Inc.
G01Q30/20
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Quick Facts
Patent No.
US 8,955,161
App. No.
14/217,099
Granted
Feb 10, 2015
Kind
B2
Abstract

An apparatus and method of performing photothermal chemical nanoidentification of a sample includes positioning a tip of a probe at a region of interest of the sample, with the tip-sample separation being less than about 10 nm. Then, IR electromagnetic energy having a selected frequency, ω, is directed towards the tip. Using PFT mode AFM operation, absorption of the energy at the region of interest is identified. Calorimetry may also be performed with the photothermal PFT system.

Claims (35)

1. A method of locally measuring IR absorption of a sample, the method comprising:

causing a probe to interact with a sample in an oscillating mode of AFM operation;

directing a locally amplified IR signal toward a sample; and

identifying a change in modulus based on the directing step;

and wherein the oscillating mode uses feedback to control the interaction between the probe and the sample, and wherein the feedback is based on a localized detected force between the probe and the sample in each oscillation cycle.

2. The method of claim 1 , wherein the oscillating mode is peak force tapping (PFT) mode.

3. The method of claim 1 , wherein the oscillating mode is contact resonance mode.

4. The method of claim 1 , further comprising tuning the IR signal over a range of frequencies to obtain a spectrum of the sample.

5. The method of claim 1 , further comprising an optical element focusing the IR signal on a tip of the probe.

6. The method of claim 1 , further comprising determining a ΔT.

7. The method of claim 6 , further comprising determining a mass by obtaining 3D topography data corresponding to a region in response to the directing step.

8. A method of photothermal chemical nanoidentification of a sample, the method comprising:

positioning a tip of a probe at a region of interest of the sample, the tip-sample separation being less than about 10 nm;

directing IR electromagnetic energy having a selected frequency, ω, towards the tip; and

using PFT mode of AFM operation to identify absorption of the energy at the region of interest.

9. The method of claim 8 , further comprising obtaining a spectrum of the sample by tuning the selected frequency to a range of frequencies.

10. The method of claim 9 , wherein absorptions of energy over the range of frequencies are acquired on a sub-millisecond timescale for at least a 20×20 nm sample area.

11. The method of claim 8 , further comprising determining an elastic modulus Y for the region of interest based on the absorption of energy.

12. The method of claim 8 , further comprising focusing the IR electromagnetic energy towards the tip using a lens.

13. The method of claim 8 , wherein the probe is metalized with at least one of Platinum Iridium and Platinum Silicide.

14. The method of claim 8 , further comprising directing the IR electromagnetic energy from a tunable monochromatic source operating in a pulsed mode with a line width below 1 cm −1 and a peak power of at least 1 mW.

15. The method of claim 8 , further comprising:

determining a ΔT based on the absorption of energy; and

determining a mass of the region of interest by obtaining 3D topography data corresponding to the region of interest.

16. A scanning probe microscope (SPM) comprising:

a probe interacting with a sample in an oscillating mode;

that uses feedback to control the interaction between the probe and the sample, and wherein the feedback is based on a substantially instantaneous force on the probe in each oscillation cycle;

a position detector for detecting a motion of the probe;

a monochromatic light source for directing monochromatic light having a selected frequency, ω, towards a tip of the probe;

an oscillating mode force detection block for determining a substantially instantaneous force between the probe and the sample from the detected motion of the probe; and

a controller in communication with the oscillating mode force detection block and operable to identify a change in a mechanical property of the sample induced by a localized enhanced electric field between the tip and the sample.

17. The SPM of claim 16 , wherein the oscillating mode is PFT Mode.

18. The SPM of claim 16 , wherein the tip radius is 50 nm or less.

19. The SPM of claim 18 , wherein the probe comprises at least one of doped Silicon and Diamond.

20. The SPM of claim 16 , wherein the monochromatic light source is a tunable External Cavity Quantum Cascade Laser (QCL).

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 25, 2017
From: SU, CHANMIN
To: BRUKER NANO, INC.
Reel/Frame 042506/0451 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 24, 2014
From: ANDREEV, GREGORY O.
To: BRUKER NANO, INC.
Reel/Frame 032507/0788 →
Continuity (6)
Continuation In Part 13306867 · Nov 29, 2011
Continuation In Part 12618641 · Nov 13, 2009
Provisional Application 61802094 · Mar 15, 2013
Provisional Application 61417837 · Nov 29, 2010
Provisional Application 61114399 · Nov 13, 2008
Related Publication 20140289912A1 · Sep 25, 2014