Method for etching film containing cobalt and palladium
Disclosed is a method for etching a film contains cobalt and palladium is provided. A hard mask is provided on the film. The method film includes a process “a” of etching the film by ion sputter etching, a process “b” of exposing a workpiece to plasma of a first gas containing halogen elements after the process “a” of etching of the film, a process “c” of exposing the workpiece to plasma of a second gas containing carbons after the process “b” of exposing the workpiece to the plasma of the first gas, and a process “d” of exposing the workpiece to plasma of a third gas containing a noble gas after the process “c” of exposing the workpiece to the plasma of the second gas. In the method, a temperature of a placement table on which the workpiece is placed is set to a first temperature of 10° C. or less in the process “a”, process “b” and process “c”.
1. A method for etching a film, which contains cobalt and palladium and on which a hard mask is provided, of a workpiece, the method comprising:
a process of etching the film by ion sputter etching;
a process of exposing a workpiece to plasma of a first gas containing halogen elements after the process of etching the film;
a process of exposing the workpiece to plasma of a second gas containing carbons after the process of exposing the workpiece to the plasma of the first gas; and
a process of exposing the workpiece to plasma of a third gas containing a noble gas after the process of exposing the workpiece to the plasma of the second gas,
wherein a temperature of a placement table on which the workpiece is placed is set to a first temperature of 10° C. or less in the process of etching the film, the process of exposing the workpiece to the plasma of the first gas and the process of exposing the workpiece to the plasma of the second gas, and
the temperature of the placement table on which the workpiece is placed is set to a second temperature higher than the first temperature in the process of exposing the workpiece to the plasma of the third gas.
2. The method for etching according to claim 1 , wherein the first temperature is −10° C. or less.
3. The method for etching according to claim 1 , wherein the third gas further contains a hydrogen gas.
4. The method for etching according to claim 1 , wherein the process of etching the film, the process of exposing the workpiece to the plasma of the first gas, the process of exposing the workpiece to the plasma of the second gas are sequentially repeated, and subsequently the process of exposing the workpiece to the plasma of the third gas is performed.