Carrier bonding and detaching processes for a semiconductor wafer
The present invention provides a temporary carrier bonding and detaching process. A first surface of a semiconductor wafer is mounted on a first carrier by a first adhesive, and a first isolation coating is disposed between the first adhesive and the first carrier. Then, a second carrier is mounted on the second surface of the semiconductor wafer. The first carrier is detached. The method of the present invention utilizes the second carrier to support and protect the semiconductor wafer, after which the first carrier is detached. Therefore, the semiconductor wafer will not be damaged or broken, thereby improving the yield rate of the semiconductor process. Furthermore, the simplicity of the detaching method for the first carrier allows for improvement in efficiency of the semiconductor process.
1. A method for handling a semiconductor wafer, comprising:
attaching a carrier to an active surface of the semiconductor wafer using an adhesive, wherein the adhesive bonds the active surface of the semiconductor wafer to an isolation coating disposed on a surface of the carrier and a portion of the surface of the carrier not having the isolation coating, the adhesive strength of the bond between the active surface of the semiconductor wafer and the isolation coating substantially less than the adhesive strength of the bond between the semiconductor wafer and the portion of the surface of the carrier not having the isolation coating;
separating the semiconductor wafer into an inner portion and an outer portion, the carrier requiring substantially less pulling force to be removed from the inner portion than the outer portion; and
removing the carrier from the inner portion of the semiconductor wafer.
2. The method of claim 1 , wherein separating the semiconductor wafer into the inner portion and the outer portion includes cutting the semiconductor wafer into the inner portion and the outer portion using a blade or a laser.
3. The method of claim 1 , wherein separating the semiconductor wafer into the inner portion and the outer portion exposes the isolation coating disposed on the surface of the carrier.
4. The method of claim 1 , wherein removing the carrier from the inner portion of the semiconductor wafer includes applying a pulling force to the carrier.
5. The method of claim 1 , wherein the isolation coating is a hydrophobic coating.
6. The method of claim 1 , further comprising:
after attaching the carrier to the semiconductor wafer,
exposing a tip of at least one conductive pillar formed in the semiconductor wafer by removing a portion of an inactive surface of the semiconductor wafer;
covering the exposed tips with a passivation layer; and
thinning the passivation layer so that the tips protrude from the passivation layer.
7. The method of claim 1 , further comprising:
attaching an inactive surface of the semiconductor wafer to a first surface of a dicing tape;
forming a cover layer on a second surface of the dicing tape, wherein the cover layer corresponds to the inner portion of the semiconductor wafer; and
illuminating the second surface of the dicing tape by an ultraviolet light, wherein the second surface of the dicing tape that is outside the cover layer becomes weakly adhesive.
8. The method of claim 1 , wherein separating the semiconductor wafer includes forming a circular groove dividing the inner portion and the outer portion, the depth of the circular groove equal to the sum of a thickness of the semiconductor wafer, a thickness of an adhesive and a tolerance.
9. The method of claim 7 , wherein a distance between the circular groove and an edge of the semiconductor wafer is greater than a distance between an edge of an isolation coating and the edge of the semiconductor wafer.
10. The method of claim 1 , further comprising the step of removing adhesive from the semiconductor wafer.
11. The method of claim 1 , wherein the active surface includes an electrical component.
12. The method of claim 1 , wherein the active surface includes an integrated circuit.