Integrated circuit devices including through-silicon-vias having integral contact pads
An integrated circuit device including an interlayer insulating layer on a substrate, a wire layer on the interlayer insulating layer, and a through-silicon-via (TSV) contact pattern having an end contacting the wire layer and integrally extending from inside of a via hole formed through the interlayer insulating layer and the substrate to outside of the via hole.
1. An integrated circuit device comprising:
a first semiconductor chip comprising a first substrate, a conductive bump and a wiring pattern on the first substrate, and a conductive via structure extending through the first substrate, wherein the wiring pattern on the first substrate electrically connects the conductive bump to the conductive via structure; and
a second semiconductor chip comprising a second substrate, an interlayer insulating layer on the second substrate, a wire layer on the interlayer insulating layer, and a through-silicon-via (TSV) contact pattern having an end adjacent the interlayer insulating layer and contacting the wire layer, the TSV contact pattern integrally extending from inside of a via hole that penetrates through the interlayer insulating layer and through the second substrate to outside of the via hole, and being electrically connected to the conductive bump of the first semiconductor chip,
wherein the TSV contact pattern comprises a unitary member including an internal plug part filling at least a portion of a space within the via hole and an external pad part being integrally connected to the internal plug part, the external pad part extending onto a backside of the second substrate opposite the interlayer insulating layer and having a width that tapers in a direction away from the backside of the second substrate, and
wherein at least a portion of the external pad part extends into the conductive bump of the first semiconductor chip and mechanically bonds the second semiconductor chip thereto.
2. The integrated circuit device of claim 1 , further comprising:
a pad protective layer comprising an organic material on the external pad part around the conductive bump, or a metal interposed between the bump and the external pad part and on the external pad part.
3. The integrated circuit device of claim 1 , wherein the TSV contact pattern comprises:
a first TSV contact pattern contacting the wire layer and filling a portion of a space within the via hole; and
a second TSV contact pattern contacting the first TSV contact pattern in the via hole, filling a remaining portion of the space within the via hole, and extending outside of the via hole.
4. The integrated circuit device of claim 3 , wherein the first TSV contact pattern comprises a first conductive pattern, a first barrier layer on the first conductive pattern, and a first seed layer interposed between the first conductive pattern and the first barrier layer,
wherein the second TSV contact pattern comprises a second conductive pattern, a second barrier layer on the second conductive pattern, and a second seed layer interposed between the second conductive pattern and the second barrier layer, and
wherein the first TSV contact pattern and the second conductive pattern are adjacent each other, with the second barrier layer and the second seed layer therebetween.
5. The integrated circuit device of claim 1 , wherein the TSV contact pattern comprises a conductive pattern, a barrier layer on the conductive pattern, and a seed layer interposed between the conductive pattern and the barrier layer, wherein the conductive pattern integrally extends from inside of the via hole to outside of the via hole.