Solid-state imaging device and method of manufacturing the same, and imaging apparatus
A solid-state imaging device includes: a semiconductor substrate provided with an effective pixel region including a light receiving section that photoelectrically converts incident light; an interconnection layer that is provided at a plane side opposite to the light receiving plane of the semiconductor substrate; a first groove portion that is provided between adjacent light receiving sections and is formed at a predetermined depth from the light receiving plane side of the semiconductor substrate; and an insulating material that is embedded in at least a part of the first groove portion.
1. A solid-state imaging device comprising:
a semiconductor substrate provided with an effective pixel region and an optical black region, the effective pixel region including light receiving sections that photoelectrically convert incident light and the optical black region being located at a periphery of the effective pixel region and being optically shielded, the semiconductor substrate having a light receiving face;
an interconnection layer that is provided on a side of the semiconductor substrate that corresponds to a face of the semiconductor substrate opposite to the light receiving face;
a first groove portion that is provided between adjacent light receiving sections and is formed at a predetermined depth in the semiconductor substrate from the light receiving face;
a second groove portion that is provided between the optical black region and the effective pixel region and is formed at a predetermined depth in the semiconductor substrate from the light receiving face;
an insulating material that is embedded in at least a part of the first groove portion; and
a high-dielectric material film formed between the first groove portion and the insulating material.
2. The solid-state imaging device of claim 1 , further comprising:
the insulating material embedded in at least a part of the second groove portion.
3. The solid-state imaging device of claim 2 , further comprising:
the high-dielectric material film formed between the second groove portion and the insulating material.
4. The solid state imaging device of claim 2 , further comprising:
a light shielding material that is embedded in at least a part of the second groove portion.
5. The solid-state imaging device of claim 1 ,
wherein the semiconductor substrate includes a device separating region that is provided between adjacent light receiving sections, includes a predetermined impurity region, and electrically separates the adjacent light receiving sections, and
the first groove portion is formed in the device separating region.
6. The solid-state imaging device of claim 1 , further comprising:
a third groove portion that is provided in the optical black region and that is formed at a predetermined depth in the semiconductor substrate from the light receiving face.
7. The solid state imaging device of claim 6 , further comprising:
a light shielding material that is embedded in at least a part of the third grooveportion.
8. An imaging apparatus comprising:
the solid-state imaging device of claim 1 ,
an optical system that focuses incident light onto the light receiving sections; and
a signal processing section that processes a signal charge that is photoelectrically converted at the light receiving sections.
9. The imaging apparatus of claim 8 , further comprising:
the insulating material embedded in at least a part of the second groove portion.
10. The imaging apparatus of claim 9 , further comprising:
the high-dielectric material film formed between the second groove portion and the insulating material.
11. The imaging apparatus of claim 9 , further comprising:
a light shielding material that is embedded in at least a part of the second groove portion.
12. The imaging apparatus of claim 8 ,
wherein the semiconductor substrate includes a device separating region that is provided between adjacent light receiving sections, includes a predetermined impurity region, and electrically separates the adjacent light receiving sections, and
the first groove portion is formed in the device separating region.
13. The imaging apparatus of claim 8 , further comprising:
a third groove portion that is provided in the optical black region and that is formed at a predetermined depth in the semiconductor substrate from the light receiving face.
14. The imaging apparatus of claim 13 , further comprising:
a light shielding material that is embedded in at least a part of the third groove portion.
15. A method of manufacturing a solid-state imaging device, comprising:
providing a semiconductor substrate that has effective pixel region and an optical black region, the effective pixel region including light receiving sections that photoelectrically convert incident light and the optical black region being located at a periphery of the effective pixel region and being optically shielded, the semiconductor substrate having a light receiving face;
forming a first groove portion between adjacent light receiving sections at a predetermined depth in the semiconductor substrate from the light receiving face,
forming a second groove portion between the optical black region and the effective pixel region at a predetermined depth in the semiconductor substrate from the light receiving face;
forming a high-dielectric material film and an insulating material in at least a part of the first groove portion such that the high-dielectric material film is between the first groove portion and the insulating material; and
forming an interconnection layer on a side of the semiconductor substrate that corresponds to a face of the semiconductor substrate opposite to the light receiving face.
16. A solid-state imaging device comprising:
a semiconductor substrate provided with an effective pixel region and an optical black region, the effective pixel region including light receiving sections that photoelectrically convert incident light and the optical black region being located at a periphery of the effective pixel region and being optically shielded, the semiconductor substrate having a light receiving face;
an interconnection layer that is provided on a side of the semiconductor substrate that corresponds to a face of the semiconductor substrate opposite to the light receiving face;
a first groove portion that is provided between adjacent light receiving sections and is formed at a predetermined depth in the semiconductor substrate from the light receiving face;
a second groove portion that is provided between the optical black region and the effective pixel region and is formed at a predetermined depth in the semiconductor substrate from the light receiving face; and
a third groove portion that is provided in the optical black region and that is formed at a predetermined depth in the semiconductor substrate from the light receiving face.
17. The solid state imaging device of claim 16 , further comprising:
a light shielding material that is embedded in at least a part of the third groove portion.
18. The solid-state imaging device of claim 16 , further comprising:
an insulating material that is embedded in at least a part of the first groove portion.
19. The solid-state imaging device of claim 18 , further comprising:
a high-dielectric material film formed between the first groove portion and the insulating material.
20. The solid-state imaging device of claim 16 , further comprising:
an insulating material that is embedded in at least a part of the second groove portion.
21. The solid-state imaging device of claim 18 , further comprising:
a high-dielectric material film formed between the second groove portion and the insulating material.
22. The solid-state imaging device of claim 16 ,
wherein the semiconductor substrate includes a device separating region that is provided between adjacent light receiving sections, includes a predetermined impurity region, and electrically separates the adjacent light receiving sections, and
the first groove portion is formed in the device separating region.
23. An imaging apparatus comprising:
the solid-state imaging device of claim 16 ,
an optical system that focuses incident light onto the light receiving sections; and
a signal processing section that processes a signal charge that is photoelectrically converted at the light receiving sections.
24. The imaging apparatus of claim 23 , further comprising:
an insulating material that is embedded in at least a part of the first groove portion.
25. The imaging apparatus of claim 24 , further comprising:
a high-dielectric material film formed between the first groove portion and the insulating material.
26. The imaging apparatus of claim 23 , further comprising:
an insulating material that is embedded in at least a part of the second groove portion.
27. The imaging apparatus of claim 26 , further comprising:
a high-dielectric material film formed between the second groove portion and the insulating material.
28. The imaging apparatus of claim 23 , further comprising:
a light shielding material that is embedded in at least a part of the second groove portion.
29. The imaging apparatus of claim 23 ,
wherein the semiconductor substrate includes a device separating region that is provided between adjacent light receiving sections, includes a predetermined impurity region, and electrically separates the adjacent light receiving sections, and
the first groove portion is formed in the device separating region.