IP Library Granted Patent US 9,042,032
Granted Patent B2
US 9,042,032 · App. 14/074,207 · Granted May 26, 2015

Optical arrangement for converting an incident light beam, method for converting a light beam to a line focus, and optical device therefor

Inventor: Holger Muenz (Aalen, DE)
Assignee: Carl Zeiss Laser Optics GmbH
G02B27/095G02B5/001G02B27/0911G02B27/0927G02B27/0972G02B27/0977
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Quick Facts
Patent No.
US 9,042,032
App. No.
14/074,207
Granted
May 26, 2015
Kind
B2
Abstract

In a method for converting a light beam to a line focus, wherein the line focus extends according to its length along a first direction (y) and is narrow in a second direction (x) perpendicular to the first direction (y), the light beam is directed onto at least one conical optically operative surface, by which it is converted to the line focus. The light beam is directed onto the at least one optically operative surface with a ring-segment-shaped cross section transversely with respect to the light propagation direction. A device, in particular for carrying out the method, and an optical arrangement for generating a light beam with a ring-segment-shaped cross section are likewise described. In accordance with a further method and a further device, a line focus is generated only with spherical and/or cylindrical elements.

Claims (49)

1. An optical arrangement, comprising:

a first optical element having a first optically operative surface having a top with a first top circumference, a circular bottom with a first bottom circumference which is greater than the first top circumference, and sides extending from the first top circumference to the first bottom circumference; and

a second optical element having a second optically operative surface having a top with a second top circumference, a circular bottom with a second bottom circumference which is greater than the second top circumference, and sides extending from the second top circumference to the second bottom circumference,

wherein:

the first and second optically operative surfaces define an axis of symmetry; and

during use of the arrangement:

a light beam is incident successively on the first optically operative surface and the second optically operative surface;

the light beam is incident on the first and second optically operative surfaces off-axis with respect to the axis of symmetry such that the light beam is not incident at an intersection of the axis of symmetry with the first optically operative surface and such that the light beam is not incident at an intersection of the axis of symmetry with the second optically operative surface;

a first light ray of the light beam is incident on the first optically operative surface at a first distance from the axis of symmetry;

the first light ray of the light beam is incident on the second optically operative surface at a second distance from the axis of symmetry;

the first distance is less than the second distance; and

when the light beam has a non-ring-segment-shaped cross section which is transverse with respect to a propagation direction of the light beam when incident on the first optically operative surface, the light beam has a ring-segment-shaped cross section which is transverse with respect to a light propagation direction of the light beam when it emerges from the second optical element, the ring-segment-shaped cross section being an incomplete ring.

2. The optical arrangement of claim 1 , wherein the non-ring-segment-shaped cross section is sized so that the ring-segment-shaped cross section is at least approximately circular-ring-segment-shaped.

3. The optical arrangement of claim 1 , wherein, during use of the optical arrangement, impingement heights of the light beam incident on the first and second optically operative surfaces are such that the ring-segment-shaped cross section is at least approximately circular-ring-segment-shaped.

4. The optical arrangement of claim 1 , further comprising a third optical element downstream of the second optical element along a path of the light beam through the optical arrangement so that, during use of the optical arrangement, the third optical element transforms the ring-segment-shaped cross section of the light beam into an at least approximately circular-ring-segment-shaped cross section.

5. The optical arrangement of claim 1 , further comprising a third optical element downstream of the second optical element along a path of the light beam through the optical arrangement, wherein, during use of the optical arrangement, the ring-segment-shaped cross section is elliptic-ring-segment-shaped, and the third optical element transforms the elliptic-ring-segment-shaped cross section into an at least approximately circular-ring-segment-shaped cross section.

6. The optical arrangement of claim 1 , wherein the first optically operative surface and the second optically operative surface are arranged on sides of the axis of symmetry which face away from one another, and, during use of the optical arrangement, impingement heights of the light beam incident on the first optically operative surface and impingement height of the light beam incident on the second optically operative surface are at least approximately at the same distance from the axis of symmetry.

7. The optical arrangement of claim 1 , wherein the first optically operative surface and the second optically operative surface have a mutually oppositely directed conicity.

8. The optical arrangement of claim 1 , wherein the first optically operative surface is reflective.

9. The optical arrangement of claim 1 , wherein the first optically operative surface is totally internally reflective.

10. The optical arrangement of claim 1 , wherein the second optically operative surface is reflective.

11. The optical arrangement of claim 1 , wherein the second optically operative surface is totally internally reflective.

12. The optical arrangement of claim 1 , wherein the first optically operative surface is refractive.

13. The optical arrangement of claim 12 , wherein the second optically operative surface is refractive.

14. A method, comprising:

directing a light beam having a ring-segment-shaped cross section transverse to a propagation of the light beam onto an optically operative surface to convert the light beam so that the light beam has a line focus which extends along a first direction and a second direction perpendicular to the first direction, a length of the line focus along the first direction being less than a length of the line focus along the second direction,

wherein:

the optically operative surface has a top with a top circumference, a circular bottom with a bottom circumference which is greater than the top circumference, and sides extending from the top circumference to the bottom circumference; and

the ring-segment-shaped cross section is an incomplete ring.

15. The method of claim 14 , comprising directing the light beam onto the optically operative surface off-axis with respect to an axis of symmetry of the optically operative surface such that the light beam is not incident at an intersection of the axis of symmetry with the optically operative surface.

16. The method of claim 14 , wherein an intensity distribution of the light in the ring-segment-shaped cross section decreases in a radial direction towards the edges so that an intensity integrated in a circumferential direction of the ring-segment-shaped cross section is at least approximately identical for all radii.

17. A system, comprising:

an optical arrangement configured to process a light beam so that, during use of the system, the light beam has a ring-segment-shaped cross section transverse to a light propagation direction of the light beam; and

an optical element downstream of the optical arrangement along a path of the light through the system, the optical element having an optically operative surface so that, during use of the optical element, the light beam having the ring-segment-shaped cross section transverse to a propagation of the light beam is directed onto the optically operative surface to convert the light beam so that the light beam has a line focus which extends along a first direction and a second direction perpendicular to the first direction, a length of the line focus along the first direction being less than a length of the line focus along the second direction,

wherein:

the optically operative surface has a top with a top circumference, a circular bottom with a bottom circumference which is greater than the top circumference, and sides extending from the top circumference to the bottom circumference; and

the ring-segment-shaped cross section is an incomplete ring.

18. The optical device of claim 17 , wherein the optically operative surface is a refractive surface.

19. A method, comprising:

directing a light beam onto an optical arrangement, the light beam having a ring-segment-shaped cross section transverse to a propagation direction of the light outside an optical axis which is defined by the optical arrangement before impinging on the optical arrangement, the light beam having a real or virtual partial-ring-shaped focus outside the optical axis after interacting with the optical arrangement; and

subsequently directing the light beam through a positive lens to convert the real or virtual partial-ring-shaped focus to a line focus which extends along a first direction and a second direction perpendicular to the first direction, a length of the line focus along the first direction being less than a length of the line focus along the second direction,

wherein the ring-segment-shaped cross section is an incomplete ring.

20. A system, comprising:

an optical arrangement; and

a positive lens,

wherein, during use of the system:

a light beam is directed onto the optical arrangement, the light beam having a ring-segment-shaped cross section transverse to a propagation direction of the light outside an optical axis which is defined by the optical arrangement before impinging on the optical arrangement, the light beam having a real or virtual partial-ring-shaped focus outside the optical axis after interacting with the optical arrangement; and

subsequently the light beam is directed through a positive lens to convert the real or virtual partial-ring-shaped focus to a line focus which extends along a first direction and a second direction perpendicular to the first direction, a length of the line focus along the first direction being less than a length of the line focus along the second direction,

wherein the ring-segment-shaped cross section is an incomplete ring.

Assignments (2)
MERGER Recorded Sep 22, 2016
From: CARL ZEISS LASER OPTICS GMBH
To: CARL ZEISS SMT GMBH
Reel/Frame 040107/0391 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 25, 2014
From: MUENZ, HOLGER
To: CARL ZEISS LASER OPTICS GMBH
Reel/Frame 032294/0581 →
Priority Claims (1)
DE 10 2011 102 588 · May 25, 2011 · national
Continuity (3)
Continuation PCTEP2012059439 · May 22, 2012
Provisional Application 61545762 · Oct 11, 2011
Related Publication 20140118843A1 · May 1, 2014