Low-K dielectric layer and porogen
A system and method for a low-k dielectric layer are provided. A preferred embodiment comprises forming a matrix and forming a porogen within the matrix. The porogen comprises an organic ring structure with fewer than fifteen carbons and a large percentage of single bonds. Additionally, the porogen may have a viscosity greater than 1.3 and a Reynolds numbers less than 0.5.
1. A method for manufacturing a semiconductor device, the method comprising:
forming a first material over a substrate;
forming a second material within the first material, wherein the second material is a porogen comprising a organic ring structure with a percentage of single bonds that is greater than about 80%; and
forming a buffer layer over the substrate prior to the forming the first material, the forming the first material over the substrate forming the first material directly on the buffer layer, wherein the buffer layer comprises a first compound and the first material comprises the first compound, wherein the forming the buffer layer and the forming the first material both utilize a first precursor and the forming the buffer layer uses a first set of process parameters and the forming the first material uses a second set of process parameters different from the first set of process parameters.
2. The method of claim 1 , wherein the porogen comprises a molecule that has fewer than fifteen carbon atoms.
3. The method of claim 2 , wherein the porogen has a viscosity greater than 1.3 centipoise and a Reynolds number of less than 0.5.
4. The method of claim 3 , wherein the porogen comprises cyclooctane.
5. The method of claim 1 , further comprising removing at least a portion of the porogen to form a low-k dielectric layer.
6. The method of claim 5 , wherein the removing at least a portion of the porogen further comprises heating the porogen using an annealing process.
7. The method of claim 5 , further comprising:
forming an opening within the low-k dielectric layer; and
filling the opening with a conductive material.
8. The method of claim 1 , further comprising forming a dielectric layer over the substrate prior to the forming the buffer layer, the forming the buffer layer forming the buffer layer directly on the dielectric layer.
9. The method of claim 1 , wherein the forming the second material further comprises introducing the porogen at a constant flow rate throughout the formation of the second material.
10. The method of claim 9 , wherein the forming the first material further comprises introducing the first material at a constant flow rate through the formation of the first material.
11. A method for manufacturing a semiconductor device, the method comprising:
forming a precursor layer by co-depositing a matrix material and a porogen onto a substrate, the porogen comprising an organic molecule, the organic molecule having a carbon ring structure and fewer than fifteen carbon atoms, wherein bonds between each of the carbon atoms are only single bonds;
forming a first dielectric layer from the precursor layer by removing the porogen from the precursor layer; and
forming a second dielectric layer over the substrate prior to the forming the precursor layer, wherein the forming the precursor layer utilizes a first precursor with a first set of process parameters and the forming the second dielectric layer utilizes the first precursor and a second set of process parameters different from the first set of process parameters.
12. The method of claim 11 , wherein the porogen has a viscosity greater than 1.3 centipoise.
13. The method of claim 11 , wherein the porogen has a Reynolds number less than 0.5.
14. The method of claim 11 , wherein the porogen is cyclooctane.
15. The method of claim 11 , further comprising forming a second dielectric layer over the substrate prior to the co-depositing the matrix material and the porogen, the co-depositing the matrix material and the porogen co-depositing the matrix material and the porogen in physical contact with the second dielectric layer.
16. The method of claim 15 , further comprising forming a contact etch stop layer over the substrate prior to the forming the second dielectric layer, the forming the second dielectric layer forming the second dielectric layer in physical contact with the contact etch stop layer.
17. The method of claim 15 , wherein the forming the precursor layer further comprises introducing the porogen and the matrix material at a constant flow rate throughout the forming the precursor layer.
18. A method for manufacturing a semiconductor device, the method comprising:
introducing a first set of precursors to a substrate under a first set of deposition parameters, the introducing the first set of precursors forming a buffer layer on the substrate; and
forming a dielectric layer on the buffer layer using the first set of precursors, wherein the forming the dielectric layer uses a second set of deposition parameters different from the first set of deposition parameters, wherein the forming the dielectric layer is performed at least in part by depositing a porogen, the porogen comprising an organic molecule, the organic molecule having a carbon ring structure and fewer than fifteen carbon atoms, wherein bonds between each of the carbon atoms are only single bonds.
19. The method of claim 18 , wherein the porogen is cyclodene.
20. The method of claim 18 , wherein the first set of deposition parameters comprises a first flow rate of a first precursor and the second set of deposition parameters comprises a second flow rate of the first precursor different from the first flow rate.
21. The method of claim 18 , wherein the buffer layer has a larger adhesion to the substrate than the dielectric layer.