Contact structure and forming method
Vias are formed within a stack of alternating active and insulating layers by forming a first sub stack, a second sub stack over the first sub stack, a first buffer layer therebetween and a second buffer layer under the first sub stack. An upper layer of the first sub stack is exposed through a set of vias by first and second etching processes. The first etching process forms a first set of etch vias through the second sub stack and stops at or in the first buffer layer. The second etching process etches through the first buffer layer to the upper layer of the first sub stack. A third etching process etches through the first set of etch vias, through the first sub stack and stops at or in the second buffer layer. A fourth etching process and etches through the second buffer layer.
1. A method for forming vias within a stack of layers comprising:
forming a stack of alternating active layers and insulating layers, comprising:
forming a first sub stack comprising N active layers separated by insulating layers;
forming a second sub stack over the first sub stack, the second sub stack comprising M active layers separated by insulating layers; and
forming a first buffer layer between the first and second sub stacks and a second buffer layer under the first sub stack;
exposing an upper layer of the first sub stack through a set of vias by:
etching, using a first etching process to form a first set of etch vias through the second sub stack and stopping at or in the first buffer layer, and then
etching, using a second etching process through the first buffer layer to the upper layer of the first sub stack; and
etching through the first sub stack by:
etching, using a third etching process through the first set of etch vias through the first sub stack and stopping at or in the second buffer layer, and then
etching, using a fourth etching process through the second buffer layer.
2. The method of claim 1 , further comprising:
etching through the vias to create a stairstep structure of landing areas on the active layers of the first sub stack and the second sub stack; and
forming interlayer conductors extending to the landing areas.
3. The method of claim 2 , wherein the etching to create a stairstep structure comprises using a single etching process to create landing areas on an integer multiple of N layers, the integer multiple being at least 2.
4. The method of claim 1 , wherein the first buffer layer has an etching time greater than the etching time of an insulating layer of the second sub stack for their respective second and first etching processes.
5. The method of claim 1 , wherein the first buffer layer (1) is made of the same material as the insulating layers of the first sub stack but has a different thickness than an insulating layer of the first sub stack, or (2) has a different material composition than the insulating layers of the first sub stack, or (3), both (1) and (2).
6. The method of claim 1 , wherein the first buffer layer has a thickness at least 1.5 times greater than the thickness of an active layer in the first sub stack.
7. The method of claim 1 , wherein the first sub stack is characterized by a first spatial period N1, and the second sub stack is characterized by a second spatial period N2, where N1 is equal to N2.
8. The method of claim 1 , further comprising:
creating an etch mask over the second sub stack, the etch mask having etch mask openings; and wherein:
the upper layer exposing step is carried out through the etch mask openings.
9. The method of claim 1 , wherein the first and second sub stack forming steps are carried out so that the upper layer of each is thicker than at least one of the active and insulating layers of the corresponding sub stack.