Apparatus and a method for investigating a sample by means of several investigation methods
A sample carrier suitable for receiving a sample, a first investigation device for investigating the sample and having a first optical beam path for a first measurement light, a second investigation device for investigating the sample and having a second optical beam path for a second measurement light, wherein the first or the second investigation device comprises a probe microscope suitable for investigating the sample and an optical component having a light-permeable section for the first measurement light and an at least partially reflecting section for the second measurement light and disposed in the first and in the second beam path such that the first optical beam path is formed by a material of the optical component in the light-permeable section and that the second optical beam path is formed with a light-reflecting deflection at the at least one partially reflecting section is provided. An associated method is also provided.
1. An apparatus for investigating a sample by means of several investigation methods comprising:
a sample carrier suitable for receiving a sample to be investigated in a sample receiving region;
a first investigation device suitable for investigating the sample according to at least one first investigation method, the first investigation device having a first optical beam path for a first measurement light, wherein the first investigation device comprises a probe microscope suitable for investigating the sample by probe microscopy, and wherein the first investigation device is arranged on a side of the sample carrier on which the sample is received;
a second investigation device suitable for investigating the sample according to at least one second investigation method different from the at least one first investigation method, the second investigation device having a second optical beam path for a second measurement light, wherein the second investigation device is arranged on a side of the sample carrier opposite to the side on which the sample is received; and
an optical component having a light-permeable section for the first measurement light as well as an at least partially reflecting section for the second measurement light and which is disposed in the first optical beam path and in the second optical beam path in such a manner that the first optical beam path is formed by a material of the optical component in the light-permeable section, and that the second optical beam path is formed with a light-reflecting deflection at the at least one partially reflecting section, wherein the optical component is arranged on the side of the sample carrier on which the sample is received.
2. The apparatus according to claim 1 , wherein the optical component in the region of the at least partially reflecting section has a flat, at least partially reflecting surface.
3. The apparatus according to claim 1 , wherein the optical component is disposed on the first investigation device.
4. The apparatus according to claim 1 , wherein the optical component is connected to a displacement device which is assigned to the first investigation device and/or the second investigation device in such a manner that as a result of an investigation-dependent displacement executed with the aid of the displacement device the optical component is co-displaced in the first investigation device and/or the second investigation device.
5. The apparatus according to claim 1 , wherein the sample to be investigated is not transparent at least for the second measurement light.
6. The apparatus according to claim 1 , wherein the sample carrier/, at least in sections, includes a transparent material for the second measurement light.
7. The apparatus according to claim 1 , wherein measurement light beams of the second measurement light on the path towards the sample and/or on the path away from the sample along the second optical beam path are deflected at the at least partially reflecting section.
8. The apparatus according to claim 1 , wherein measurement light beams of the first measurement light on the path towards the sample and/or on the path away from the sample along the first optical beam path run through the light-permeable section of the optical component.
9. The apparatus according to claim 1 , wherein the at least partially reflecting section is formed on an inner surface of the optical component.
10. The apparatus according to claim 1 , wherein the first investigation device is formed on the side of the sample carrier on which the sample receiving region is formed.
11. The apparatus according to claim 1 , wherein the second investigation device is formed on the opposite side of the sample carrier facing away from the sample receiving region.
12. The apparatus according to claim 1 , wherein the first investigation device and/or the second investigation device comprises an investigation device from the following group of investigation devices: atomic force microscope, Raman spectroscope, epi illumination, optical microscope, absorption measuring device and fluorescence measuring device.
13. A method for investigating a sample by means of several investigation methods comprising the following process steps:
disposing a sample to be investigated in a sample receiving region of a sample carrier;
performing a probe microscopic investigation of the sample using a first investigation method by means of a first investigation device which comprises a probe microscope using a first measurement light, wherein a first optical beam path is formed for the first measurement light which is assigned to the probe microscope, the first investigation device being arranged on a side of the sample carrier on which the sample is received; and
performing a further investigation of the sample using a second investigation method by means of a second investigation device different from the first investigation method using a second measurement light, wherein a second optical beam path is formed for the second measurement light, wherein the second investigation device is arranged on a side of the sample carrier opposite to the side on which the sample is received;
wherein, when performing the probe-microscopic investigation, the first optical beam path is formed by a material of an optical component in a light-permeable section of the optical component,
wherein, when performing the further investigation, the second optical beam path is deflected at an at least partially reflecting section of the optical component by means of light reflection or conversely;
wherein the optical component is arranged on the side of the sample carrier on which the sample is received.
14. The method according to claim 13 , wherein the first investigation and the second investigation are carried out at least temporarily simultaneously in such a manner that measurement light beams of the first measurement light run along the first optical beam path and measurement light beams of the second measurement light run along the second optical beam path simultaneously.